Copertina

Si/SiGe multi-channel superlattice structure epitaxial growth with segmented temperature control for Next-Generation Logic Devices

Fuente: arXiv

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Dettagli Bibliografici
Autori principali:	Yao, Wenlong, Li, Zhigang, Bai, Guobin, Gao, Jianfeng, Yu, Jiahan, Li, Junfeng, Wang, Xiaolei, Luo, Jun
Natura:	Preprint
Pubblicazione:	2026
Soggetti:	Materials Science Applied Physics
Accesso online:	Acceder al recurso
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