Gutiérrez-Cruz, A., Rathnathilaka, K. A. C., Taskinen, J. M., Vaimala, T., Grigoras, K., Mishra, H., . . . Ronzani, A. (2026). SC-1 Etching of Niobium and Titanium Nitride Thin Films.
Chicago Style (17th ed.) CitationGutiérrez-Cruz, Adrián, K. A. C. Rathnathilaka, Jani M. Taskinen, Tuomas Vaimala, Kestutis Grigoras, Harshad Mishra, Rishabh Upadhyay, Jorden Senior, and Alberto Ronzani. SC-1 Etching of Niobium and Titanium Nitride Thin Films. 2026.
MLA (9th ed.) CitationGutiérrez-Cruz, Adrián, et al. SC-1 Etching of Niobium and Titanium Nitride Thin Films. 2026.
Warning: These citations may not always be 100% accurate.