SC-1 Etching of Niobium and Titanium Nitride Thin Films

Fuente: arXiv
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Bibliographic Details
Main Authors: Gutiérrez-Cruz, Adrián, Rathnathilaka, K. A. C., Taskinen, Jani M., Vaimala, Tuomas, Grigoras, Kestutis, Mishra, Harshad, Upadhyay, Rishabh, Senior, Jorden, Ronzani, Alberto
Format: Preprint
Published: 2026
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