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SC-1 Etching of Niobium and Titanium Nitride Thin Films

Fuente: arXiv

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Bibliographic Details
Main Authors:	Gutiérrez-Cruz, Adrián, Rathnathilaka, K. A. C., Taskinen, Jani M., Vaimala, Tuomas, Grigoras, Kestutis, Mishra, Harshad, Upadhyay, Rishabh, Senior, Jorden, Ronzani, Alberto
Format:	Preprint
Published:	2026
Subjects:	Materials Science Mesoscale and Nanoscale Physics
Online Access:	Acceder al recurso
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