LithoGRPO: Fast Inverse Lithography via GRPO Reinforced Flow Matching

Fuente: arXiv

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Bibliographic Details
Main Authors:	Lai, Yao, Xiong, Xuyuan, Xue, Zeyue, Chen, Guojin, Wang, Jing, Liu, Xihui, Zhang, Rui, Mullins, Robert, Yu, Bei, Luo, Ping
Format:	Preprint
Published:	2026
Subjects:	Machine Learning
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2606.00228