Catalytic precursor dissociation in Hot-Wire CVD and comparing a-Si:H growth under continuous and pulsed silane flow conditions

Fuente: arXiv

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Detalles Bibliográficos
Autores principales:	Goyal, Swati, Singh, Karam Veer, Dusane, Rajiv O., Muneshwar, Triratna P.
Formato:	Preprint
Publicado:	2026
Materias:	Materials Science
Acceso en línea:	Acceder al recurso
Etiquetas:	Agregar Etiqueta Sin Etiquetas, Sea el primero en etiquetar este registro!

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