Catalytic precursor dissociation in Hot-Wire CVD and comparing a-Si:H growth under continuous and pulsed silane flow conditions

Fuente: arXiv

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Dettagli Bibliografici
Autori principali:	Goyal, Swati, Singh, Karam Veer, Dusane, Rajiv O., Muneshwar, Triratna P.
Natura:	Preprint
Pubblicazione:	2026
Soggetti:	Materials Science
Accesso online:	Acceder al recurso
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