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| Autori principali: | , , , , , , , , , |
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| Natura: | Preprint |
| Pubblicazione: |
2026
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| Soggetti: | |
| Accesso online: | https://arxiv.org/abs/2606.01345 |
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| _version_ | 1866916071986954240 |
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| author | Xiao, Qing Liu, Yanling Ma, Changjian Liu, Danqing Qin, Zhiyuan Zhao, Qianyi Huang, Chengyuan Ha, Mengke Li, Zhenhao Cheng, Guanglei |
| author_facet | Xiao, Qing Liu, Yanling Ma, Changjian Liu, Danqing Qin, Zhiyuan Zhao, Qianyi Huang, Chengyuan Ha, Mengke Li, Zhenhao Cheng, Guanglei |
| contents | Complex oxide interfaces, such as \mathrm{SrTiO_3} and \mathrm{KTaO_3} based heterostructures, host rich correlated phenomena with strong potential for advanced device applications. However, these interfaces are extremely susceptible to contamination and defect formation during nanofabrication, which often compromises device performance. Here, we present a solvent-free method for patterning oxide interfaces by employing high-resolution transferable thin metal masks in conjunction with oxygen-enriched Ar+ milling, which enables a clean and well-controlled nanofabrication process. Transport measurements demonstrate that the fabricated devices preserve their intrinsic properties, including high carrier mobilities, with negligible degradation compared to the pristine interfaces. This technique offers a convenient and robust route for engineering high-performance oxide electronic devices with precisely tailored transport characteristics. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2606_01345 |
| institution | arXiv |
| publishDate | 2026 |
| record_format | arxiv |
| spellingShingle | High-quality Nano-patterning of Oxide Interfaces Using Transferred Gold Mask Xiao, Qing Liu, Yanling Ma, Changjian Liu, Danqing Qin, Zhiyuan Zhao, Qianyi Huang, Chengyuan Ha, Mengke Li, Zhenhao Cheng, Guanglei Materials Science Mesoscale and Nanoscale Physics Complex oxide interfaces, such as \mathrm{SrTiO_3} and \mathrm{KTaO_3} based heterostructures, host rich correlated phenomena with strong potential for advanced device applications. However, these interfaces are extremely susceptible to contamination and defect formation during nanofabrication, which often compromises device performance. Here, we present a solvent-free method for patterning oxide interfaces by employing high-resolution transferable thin metal masks in conjunction with oxygen-enriched Ar+ milling, which enables a clean and well-controlled nanofabrication process. Transport measurements demonstrate that the fabricated devices preserve their intrinsic properties, including high carrier mobilities, with negligible degradation compared to the pristine interfaces. This technique offers a convenient and robust route for engineering high-performance oxide electronic devices with precisely tailored transport characteristics. |
| title | High-quality Nano-patterning of Oxide Interfaces Using Transferred Gold Mask |
| topic | Materials Science Mesoscale and Nanoscale Physics |
| url | https://arxiv.org/abs/2606.01345 |