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Micro and Nano Engineering

Fuente: DOAJ

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Bibliographic Details
Format:	Revista científica
Language:	EN
Published:	Elsevier 2019
Subjects:	nanotechnology microelectronics nanolithography nanometrology nanofabrication microdevices Electronics TK7800-8360 Technology (General) T1-995
Online Access:	Acceder al recurso
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format	Revista científica
id	doaj_https___doaj_org_toc_2590-0072
institution	DOAJ
language	EN
publishDate	2019
publisher	Elsevier
record_format	doaj
spellingShingle	Micro and Nano Engineering nanotechnology microelectronics nanolithography nanometrology nanofabrication microdevices Electronics TK7800-8360 Technology (General) T1-995
title	Micro and Nano Engineering
topic	nanotechnology microelectronics nanolithography nanometrology nanofabrication microdevices Electronics TK7800-8360 Technology (General) T1-995
url	https://doaj.org/toc/2590-0072