| _version_ | 1866826711678582784 |
|---|---|
| format | Revista científica |
| id | doaj_https___doaj_org_toc_2673-687X |
| institution | DOAJ |
| language | EN |
| publishDate | 2023 |
| publisher | MDPI AG |
| record_format | doaj |
| spellingShingle | Nanomanufacturing micro- and nanoelectromechanical systems plasma surface engineering plasma etching laser surface engineering 3d nanomanufacturing photonic and plasmonic devices Manufacturing industries HD9720-9975 Plasma engineering. Applied plasma dynamics TA2001-2040 |
| title | Nanomanufacturing |
| topic | micro- and nanoelectromechanical systems plasma surface engineering plasma etching laser surface engineering 3d nanomanufacturing photonic and plasmonic devices Manufacturing industries HD9720-9975 Plasma engineering. Applied plasma dynamics TA2001-2040 |
| url | https://doaj.org/toc/2673-687X |