. (2017). Fabrication of mems devices – a scanning micro mirror case study. Instituto Tecnológico Metropolitano.
Chicago Style (17th ed.) CitationFabrication of Mems Devices – a Scanning Micro Mirror Case Study. Instituto Tecnológico Metropolitano, 2017.
MLA (9th ed.) CitationFabrication of Mems Devices – a Scanning Micro Mirror Case Study. Instituto Tecnológico Metropolitano, 2017.
Warning: These citations may not always be 100% accurate.