Microwave Frequency Characterization of Barium Titanate Films Obtained Via Sol-Gel

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Autore principale: José-Ignacio Marulanda-Bernal
Natura: Artículo científico
Lingua:en
Pubblicazione: Universidad Pedagógica y Tecnológica de Colombia 2020
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author José-Ignacio Marulanda-Bernal
author_facet José-Ignacio Marulanda-Bernal
contents Microwave Frequency Characterization of Barium Titanate Films Obtained Via Sol-Gel José-Ignacio Marulanda-Bernal Wilson-Henry Gallo-Castrillón Diana-Marybel Mosquera-Palacio Ingeniería Sol Gel thin films loss tangent ferroelectrics The present work focuses on the structural, morphological and dielectric characterization of barium titanate films (BTO or BaTiO3 due to its chemical formula) deposited by spin coating on crystalline silicon (Si) substrates and CPW resonators using the Sol-Gel technique with a Ba/Ti molar ratio of 0.5/0.5. The coplanar waveguides were manufactured on alumina substrates (Al2O3) with 3 μm of gold (Au) metallization using the laser ablation technique. The scanning electron microscopy (SEM) with X-ray energy dispersion spectrometry (EDS) showed the existence of a BTO film with an elementary composition of 14.62% barium and 5.65% titanium, with a thickness of 0.77 μm measured using the profilometric mode of the atomic force microscopy (AFM). Dielectric characterization was carried out by comparing the frequency response (parameter S21) of a CPW resonator with deposited BTO film and another reference resonator (without film) using a network vector analyzer (VNA). These measurements are compared in turn with computational simulations to obtain the dielectric properties. For the BTO film a relative dielectric constant (ɛr) of 160 was determined with a loss tangent (Tandδ) of 0.012 for a frequency of 3.60 GHz. The dielectric constant and the ferroelectric property of the material produced are quite promising for applications in microwave circuits, such as miniaturization and tuning. 2020 artículo científico 0121-1129 https://www.redalyc.org/articulo.oa?id=413962511005 https://www.redalyc.org/journal/4139/413962511005/ https://www.redalyc.org/journal/4139/413962511005/html/ https://www.redalyc.org/journal/4139/413962511005/413962511005.epub https://www.redalyc.org/journal/4139/413962511005/movil https://doi.org/10.19053/01211129.v29.n54.2020.10416 en http://www.redalyc.org/revista.oa?id=4139 Facultad de Ingeniería application/pdf Universidad Pedagógica y Tecnológica de Colombia Facultad de Ingeniería (Colombia) Num.54 Vol.29
format Artículo científico
id redalyc_413962511005
institution Redalyc
language en
publishDate 2020
publisher Universidad Pedagógica y Tecnológica de Colombia
spellingShingle Microwave Frequency Characterization of Barium Titanate Films Obtained Via Sol-Gel
José-Ignacio Marulanda-Bernal
Ingeniería
Sol
Gel
thin films
loss tangent
ferroelectrics
Microwave Frequency Characterization of Barium Titanate Films Obtained Via Sol-Gel José-Ignacio Marulanda-Bernal Wilson-Henry Gallo-Castrillón Diana-Marybel Mosquera-Palacio Ingeniería Sol Gel thin films loss tangent ferroelectrics The present work focuses on the structural, morphological and dielectric characterization of barium titanate films (BTO or BaTiO3 due to its chemical formula) deposited by spin coating on crystalline silicon (Si) substrates and CPW resonators using the Sol-Gel technique with a Ba/Ti molar ratio of 0.5/0.5. The coplanar waveguides were manufactured on alumina substrates (Al2O3) with 3 μm of gold (Au) metallization using the laser ablation technique. The scanning electron microscopy (SEM) with X-ray energy dispersion spectrometry (EDS) showed the existence of a BTO film with an elementary composition of 14.62% barium and 5.65% titanium, with a thickness of 0.77 μm measured using the profilometric mode of the atomic force microscopy (AFM). Dielectric characterization was carried out by comparing the frequency response (parameter S21) of a CPW resonator with deposited BTO film and another reference resonator (without film) using a network vector analyzer (VNA). These measurements are compared in turn with computational simulations to obtain the dielectric properties. For the BTO film a relative dielectric constant (ɛr) of 160 was determined with a loss tangent (Tandδ) of 0.012 for a frequency of 3.60 GHz. The dielectric constant and the ferroelectric property of the material produced are quite promising for applications in microwave circuits, such as miniaturization and tuning. 2020 artículo científico 0121-1129 https://www.redalyc.org/articulo.oa?id=413962511005 https://www.redalyc.org/journal/4139/413962511005/ https://www.redalyc.org/journal/4139/413962511005/html/ https://www.redalyc.org/journal/4139/413962511005/413962511005.epub https://www.redalyc.org/journal/4139/413962511005/movil https://doi.org/10.19053/01211129.v29.n54.2020.10416 en http://www.redalyc.org/revista.oa?id=4139 Facultad de Ingeniería application/pdf Universidad Pedagógica y Tecnológica de Colombia Facultad de Ingeniería (Colombia) Num.54 Vol.29
title Microwave Frequency Characterization of Barium Titanate Films Obtained Via Sol-Gel
topic Ingeniería
Sol
Gel
thin films
loss tangent
ferroelectrics
url https://www.redalyc.org/articulo.oa?id=413962511005
https://www.redalyc.org/journal/4139/413962511005/
https://www.redalyc.org/journal/4139/413962511005/html/
https://www.redalyc.org/journal/4139/413962511005/413962511005.epub
https://www.redalyc.org/journal/4139/413962511005/movil
https://doi.org/10.19053/01211129.v29.n54.2020.10416