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Description and Characterization of a ECR Plasma Device Developed for Thin Film Deposition

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Bibliographic Details
Main Author:	J.A.S. da Matta
Format:	Artículo científico
Language:	en
Published:	Sociedade Brasileira de Física 2003
Subjects:	Física, Astronomía y Matemáticas
Online Access:	Acceder al recurso
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