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Design and characterization of an RF plasma cleaner

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Détails bibliographiques
Auteur principal:	G.P. Canal
Format:	Artículo científico
Langue:	en
Publié:	Sociedade Brasileira de Física 2010
Sujets:	Física, Astronomía y Matemáticas RF discharge plasma cleaner Langmuir probe
Accès en ligne:	Acceder al recurso
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