Pulsed power modulators for surface treatment by plasma immersion ion implantation
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| Format: | Artículo científico |
| Sprache: | en |
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Sociedade Brasileira de Física
2004
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| _version_ | 1876469356269928448 |
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| author | J. O. Rossi |
| author_facet | J. O. Rossi |
| contents | Pulsed power modulators for surface treatment by plasma immersion ion implantation J. O. Rossi M. Ueda J. J. Barroso Física, Astronomía y Matemáticas The treatment of surfaces by plasma immersion ion implantation requires pulsed power modulators to providenegative high voltage pulses. To achieve this requirement, we have developed three basic circuit configurations in our laboratory: pulse forming network (PFN), hard-tube pulser (HT) and Blumlein line. In this paperwe discuss these three types of circuit topologies.As experimental results, first we present the voltage/currentcharacteristic waveforms of PFN and HT pulsers in the PIII treatment of different materials (aluminum, siliconand stainless steel) as well we describe the surface characterization of the materials thereof treated.Andfinally,we show recent high voltage tests of a high voltage Blumlein pulser (150kV/300A/1µs) to be used insurface treatments of polymers and aluminum alloys. 2004 artículo científico 0103-9733 https://www.redalyc.org/articulo.oa?id=46434811 en http://www.redalyc.org/revista.oa?id=464 Brazilian Journal of Physics application/pdf Sociedade Brasileira de Física Brazilian Journal of Physics (Brasil) Num.4B Vol.34 |
| format | Artículo científico |
| id | redalyc_46434811 |
| institution | Redalyc |
| language | en |
| publishDate | 2004 |
| publisher | Sociedade Brasileira de Física |
| spellingShingle | Pulsed power modulators for surface treatment by plasma immersion ion implantation J. O. Rossi Física, Astronomía y Matemáticas Pulsed power modulators for surface treatment by plasma immersion ion implantation J. O. Rossi M. Ueda J. J. Barroso Física, Astronomía y Matemáticas The treatment of surfaces by plasma immersion ion implantation requires pulsed power modulators to providenegative high voltage pulses. To achieve this requirement, we have developed three basic circuit configurations in our laboratory: pulse forming network (PFN), hard-tube pulser (HT) and Blumlein line. In this paperwe discuss these three types of circuit topologies.As experimental results, first we present the voltage/currentcharacteristic waveforms of PFN and HT pulsers in the PIII treatment of different materials (aluminum, siliconand stainless steel) as well we describe the surface characterization of the materials thereof treated.Andfinally,we show recent high voltage tests of a high voltage Blumlein pulser (150kV/300A/1µs) to be used insurface treatments of polymers and aluminum alloys. 2004 artículo científico 0103-9733 https://www.redalyc.org/articulo.oa?id=46434811 en http://www.redalyc.org/revista.oa?id=464 Brazilian Journal of Physics application/pdf Sociedade Brasileira de Física Brazilian Journal of Physics (Brasil) Num.4B Vol.34 |
| title | Pulsed power modulators for surface treatment by plasma immersion ion implantation |
| topic | Física, Astronomía y Matemáticas |
| url | https://www.redalyc.org/articulo.oa?id=46434811 |