Pulsed power modulators for surface treatment by plasma immersion ion implantation

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1. Verfasser: J. O. Rossi
Format: Artículo científico
Sprache:en
Veröffentlicht: Sociedade Brasileira de Física 2004
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author J. O. Rossi
author_facet J. O. Rossi
contents Pulsed power modulators for surface treatment by plasma immersion ion implantation J. O. Rossi M. Ueda J. J. Barroso Física, Astronomía y Matemáticas The treatment of surfaces by plasma immersion ion implantation requires pulsed power modulators to providenegative high voltage pulses. To achieve this requirement, we have developed three basic circuit configurations in our laboratory: pulse forming network (PFN), hard-tube pulser (HT) and Blumlein line. In this paperwe discuss these three types of circuit topologies.As experimental results, first we present the voltage/currentcharacteristic waveforms of PFN and HT pulsers in the PIII treatment of different materials (aluminum, siliconand stainless steel) as well we describe the surface characterization of the materials thereof treated.Andfinally,we show recent high voltage tests of a high voltage Blumlein pulser (150kV/300A/1µs) to be used insurface treatments of polymers and aluminum alloys. 2004 artículo científico 0103-9733 https://www.redalyc.org/articulo.oa?id=46434811 en http://www.redalyc.org/revista.oa?id=464 Brazilian Journal of Physics application/pdf Sociedade Brasileira de Física Brazilian Journal of Physics (Brasil) Num.4B Vol.34
format Artículo científico
id redalyc_46434811
institution Redalyc
language en
publishDate 2004
publisher Sociedade Brasileira de Física
spellingShingle Pulsed power modulators for surface treatment by plasma immersion ion implantation
J. O. Rossi
Física, Astronomía y Matemáticas
Pulsed power modulators for surface treatment by plasma immersion ion implantation J. O. Rossi M. Ueda J. J. Barroso Física, Astronomía y Matemáticas The treatment of surfaces by plasma immersion ion implantation requires pulsed power modulators to providenegative high voltage pulses. To achieve this requirement, we have developed three basic circuit configurations in our laboratory: pulse forming network (PFN), hard-tube pulser (HT) and Blumlein line. In this paperwe discuss these three types of circuit topologies.As experimental results, first we present the voltage/currentcharacteristic waveforms of PFN and HT pulsers in the PIII treatment of different materials (aluminum, siliconand stainless steel) as well we describe the surface characterization of the materials thereof treated.Andfinally,we show recent high voltage tests of a high voltage Blumlein pulser (150kV/300A/1µs) to be used insurface treatments of polymers and aluminum alloys. 2004 artículo científico 0103-9733 https://www.redalyc.org/articulo.oa?id=46434811 en http://www.redalyc.org/revista.oa?id=464 Brazilian Journal of Physics application/pdf Sociedade Brasileira de Física Brazilian Journal of Physics (Brasil) Num.4B Vol.34
title Pulsed power modulators for surface treatment by plasma immersion ion implantation
topic Física, Astronomía y Matemáticas
url https://www.redalyc.org/articulo.oa?id=46434811