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Hollow Cathode Magnetron Deposition of AlN thin Films: Crystalline Structure and Morphology

Fuente: Redalyc

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Détails bibliographiques
Auteur principal:	I. C. Oliveira
Format:	Artículo científico
Langue:	en
Publié:	Sociedade Brasileira de Física 2006
Sujets:	Física, Astronomía y Matemáticas XRD amd AFM AlN thin films Hollow cathode magnetron deposition
Accès en ligne:	Acceder al recurso
Tags:	Ajouter un tag Pas de tags, Soyez le premier à ajouter un tag!

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