Adherent Diamond-Like Carbon Coatings on Metals Via PECVD and IBAD
Fuente:
Redalyc
Enregistré dans:
| Auteur principal: | |
|---|---|
| Format: | Artículo científico |
| Langue: | en |
| Publié: |
Sociedade Brasileira de Física
2006
|
| Sujets: | |
| Accès en ligne: | |
| Tags: |
Ajouter un tag
Pas de tags, Soyez le premier à ajouter un tag!
|
| _version_ | 1876444491173330944 |
|---|---|
| author | Gil Capote |
| author_facet | Gil Capote |
| contents | Adherent Diamond-Like Carbon Coatings on Metals Via PECVD and IBAD Gil Capote Luís F. Bonetti Lúcia V. Santos Vladimir J. Trava-Airoldi Evaldo J. Corat Física, Astronomía y Matemáticas Diamond Ion beam like carbon assisted deposition Plasma enhanced chemical vapor deposition Adherent and low-stress a-C:H films were deposited on Ti6Al4V and stainless steel substrates using PECVDand IBAD techniques. An amorphous silicon interlayer was applied to improve the adhesion of the a-C:Hfilms on the metal substrates. The XPS technique was employed to analyze the chemical bondings within theinterfaces. The elemental composition and atomic density of the films were determined by ion beam analysis.The film microstructure was studied by means of Raman scattering spectroscopy. The mechanical propertieswere determined by means of stress and hardness measurements. The adherence was evaluated by means ofscratch tests. The tests showed that the composition, the microstructure, and the mechanical properties of thefilms depend on the intensity of the ion bombardment and on the ion current. 2006 artículo científico 0103-9733 https://www.redalyc.org/articulo.oa?id=46436550 en http://www.redalyc.org/revista.oa?id=464 Brazilian Journal of Physics application/pdf Sociedade Brasileira de Física Brazilian Journal of Physics (Brasil) Num.3B Vol.36 |
| format | Artículo científico |
| id | redalyc_46436550 |
| institution | Redalyc |
| language | en |
| publishDate | 2006 |
| publisher | Sociedade Brasileira de Física |
| spellingShingle | Adherent Diamond-Like Carbon Coatings on Metals Via PECVD and IBAD Gil Capote Física, Astronomía y Matemáticas Diamond Ion beam like carbon assisted deposition Plasma enhanced chemical vapor deposition Adherent Diamond-Like Carbon Coatings on Metals Via PECVD and IBAD Gil Capote Luís F. Bonetti Lúcia V. Santos Vladimir J. Trava-Airoldi Evaldo J. Corat Física, Astronomía y Matemáticas Diamond Ion beam like carbon assisted deposition Plasma enhanced chemical vapor deposition Adherent and low-stress a-C:H films were deposited on Ti6Al4V and stainless steel substrates using PECVDand IBAD techniques. An amorphous silicon interlayer was applied to improve the adhesion of the a-C:Hfilms on the metal substrates. The XPS technique was employed to analyze the chemical bondings within theinterfaces. The elemental composition and atomic density of the films were determined by ion beam analysis.The film microstructure was studied by means of Raman scattering spectroscopy. The mechanical propertieswere determined by means of stress and hardness measurements. The adherence was evaluated by means ofscratch tests. The tests showed that the composition, the microstructure, and the mechanical properties of thefilms depend on the intensity of the ion bombardment and on the ion current. 2006 artículo científico 0103-9733 https://www.redalyc.org/articulo.oa?id=46436550 en http://www.redalyc.org/revista.oa?id=464 Brazilian Journal of Physics application/pdf Sociedade Brasileira de Física Brazilian Journal of Physics (Brasil) Num.3B Vol.36 |
| title | Adherent Diamond-Like Carbon Coatings on Metals Via PECVD and IBAD |
| topic | Física, Astronomía y Matemáticas Diamond Ion beam like carbon assisted deposition Plasma enhanced chemical vapor deposition |
| url | https://www.redalyc.org/articulo.oa?id=46436550 |