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Influence of the Substrate Bias Voltage on the Crystallographic Structure and Surface Composition of Ti6A14V Thin Films Deposited by rf Magnetron Sputtering

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Bibliographic Details
Main Author:	J. F. Marco
Format:	Artículo científico
Language:	en
Published:	Sociedade Brasileira de Física 2006
Subjects:	Física, Astronomía y Matemáticas Bias Steel Sputtering
Online Access:	Acceder al recurso
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