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Bibliographic Details
Main Author: R. Bustamante
Format: Artículo científico
Language:en
Published: Sociedade Brasileira de Física 2006
Subjects:
Física, Astronomía y Matemáticas
RF
Hydrogen
Gallium arsenide
magnetron sputtering
Online Access:https://www.redalyc.org/articulo.oa?id=46436563
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https://www.redalyc.org/articulo.oa?id=46436563

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