PRINCIPAL FACTORS DETERMINATION IN THE GROWTH OF THIN FILMS USING TAGUCHI'S TECHNIQUE
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| Format: | Artículo científico |
| Language: | en |
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Universidad Nacional Autónoma de México
2007
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| _version_ | 1876481336347197440 |
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| author | E. R. Vázquez-Cerón |
| author_facet | E. R. Vázquez-Cerón |
| contents | PRINCIPAL FACTORS DETERMINATION IN THE GROWTH OF THIN FILMS USING TAGUCHI'S TECHNIQUE E. R. Vázquez-Cerón V. R. Barrales-Guadarrama E. M. Rodríguez-Rodríguez R. Barrales-Guadarrama Ingeniería A methodology to improve the production and quality of deposited thin films has been developed for the PLD technique. The main purpose is the optimization of electrical and transport properties of the films through the characterization of growth parameters concerning some important characteristics of the material such as roughness, resistance, homogeneity, etc. It improves the production process of thin films, and it also decreases costs, conserving the quality at the same time. The use of interpolations and orthogona arrangements allows to evaluate the growth parameters and to predict results eliminating the need to repeat experiments. 2007 artículo científico 1665-6423 https://www.redalyc.org/articulo.oa?id=47411543005 en http://www.redalyc.org/revista.oa?id=474 Journal of Applied Research and Technology application/pdf Universidad Nacional Autónoma de México Journal of Applied Research and Technology (México) Num.2 Vol.5 |
| format | Artículo científico |
| id | redalyc_47411543005 |
| institution | Redalyc |
| language | en |
| publishDate | 2007 |
| publisher | Universidad Nacional Autónoma de México |
| spellingShingle | PRINCIPAL FACTORS DETERMINATION IN THE GROWTH OF THIN FILMS USING TAGUCHI'S TECHNIQUE E. R. Vázquez-Cerón Ingeniería PRINCIPAL FACTORS DETERMINATION IN THE GROWTH OF THIN FILMS USING TAGUCHI'S TECHNIQUE E. R. Vázquez-Cerón V. R. Barrales-Guadarrama E. M. Rodríguez-Rodríguez R. Barrales-Guadarrama Ingeniería A methodology to improve the production and quality of deposited thin films has been developed for the PLD technique. The main purpose is the optimization of electrical and transport properties of the films through the characterization of growth parameters concerning some important characteristics of the material such as roughness, resistance, homogeneity, etc. It improves the production process of thin films, and it also decreases costs, conserving the quality at the same time. The use of interpolations and orthogona arrangements allows to evaluate the growth parameters and to predict results eliminating the need to repeat experiments. 2007 artículo científico 1665-6423 https://www.redalyc.org/articulo.oa?id=47411543005 en http://www.redalyc.org/revista.oa?id=474 Journal of Applied Research and Technology application/pdf Universidad Nacional Autónoma de México Journal of Applied Research and Technology (México) Num.2 Vol.5 |
| title | PRINCIPAL FACTORS DETERMINATION IN THE GROWTH OF THIN FILMS USING TAGUCHI'S TECHNIQUE |
| topic | Ingeniería |
| url | https://www.redalyc.org/articulo.oa?id=47411543005 |