Skip to content
VuFind
  • Login
    • English
    • Deutsch
    • Español
    • Français
    • Italiano
Advanced
  • Cite this
  • Text this
  • Email this
  • Print
  • Export Record
    • Export to RefWorks
    • Export to EndNoteWeb
    • Export to EndNote
  • Save to List
  • Permanent link
Cover Image

Saved in:
Bibliographic Details
Main Author: E. Gómez-Méndez
Format: Artículo científico
Language:en
Published: Universidad Nacional Autónoma de México 2020
Subjects:
Ingeniería
thin films
Spin coater
photoresist
vacuum chuck
mechanical design
Online Access:https://www.redalyc.org/articulo.oa?id=47471661002
https://www.redalyc.org/journal/474/47471661002/
https://www.redalyc.org/journal/474/47471661002/html/
https://www.redalyc.org/journal/474/47471661002/47471661002.epub
https://www.redalyc.org/journal/474/47471661002/movil
Tags: Add Tag
No Tags, Be the first to tag this record!
  • Holdings
  • Description
  • Table of Contents
  • Comments
  • Similar Items
  • Staff View

Internet

https://www.redalyc.org/articulo.oa?id=47471661002
https://www.redalyc.org/journal/474/47471661002/
https://www.redalyc.org/journal/474/47471661002/html/
https://www.redalyc.org/journal/474/47471661002/47471661002.epub
https://www.redalyc.org/journal/474/47471661002/movil

Similar Items

  • Mechanical and Electronic Systems of an Open Source Based Spin and Dip Coater
    by: Luis. J. Segura
    Published: (2016)
  • A Simple Substrate Heater Device With Temperature Controller for Thin Film Preparation
    by: G. Rendón
    Published: (2012)
  • A microstructural and corrosion resistance study of (Zr, Si, Ti)N-Ni coatings produced through co-sputtering
    by: Estrella Natali Borja Goyeneche
    Published: (2018)
  • Spin Coating technique for obtaining nanometric thin films in the system La0.7Sr0.3MnO3
    by: Jenny Alejandra Mera-Córdoba
    Published: (2017)
  • Effects of excimer laser annealing on low-temperature solution based indium-zinc-oxide thin film transistor fabrication
    by: Chao-Nan Chen
    Published: (2015)

Search Options

  • Search History
  • Advanced Search

Find More

  • Browse the Catalog
  • Browse Alphabetically
  • Explore Channels
  • Course Reserves
  • New Items

Need Help?

  • Search Tips
  • Ask a Librarian
  • FAQs