Development of a bearing-free, low-vibration vacuum chuck for a spin-coating apparatus
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Redalyc
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| Natura: | Artículo científico |
| Lingua: | en |
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Universidad Nacional Autónoma de México
2020
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| _version_ | 1876431159374643200 |
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| author | E. Gómez-Méndez |
| author_facet | E. Gómez-Méndez |
| contents | Development of a bearing-free, low-vibration vacuum chuck for a spin-coating apparatus E. Gómez-Méndez C. M. Posada J. M. Jaramillo-Ocampo Ingeniería thin films Spin coater photoresist vacuum chuck mechanical design This work presents the design and fabrication of two different vacuum chuck systems for a spin-coater apparatus. One of the vacuum chuck designs considered was sealed with toric joints and the other was sealed with bearings. These vacuum chucks were adapted to a DC brushless motor which has a non-perforated shaft. The vacuum chuck with toric joints presented a superior performance when compared to the design with bearings. The best chuck design showed variations in temperature below 1 °C for spin-coating speeds in the range of 100 to 4000 rpm. In all cases, the vibrations of the spin-coating apparatus were measured to be below 1 μm RMS. To test the performance of the spin-coater, photoresist (PR) films were spin-coated at different rotational speeds. At 3000 rpm the measured PR thickness was 0.42 ± 0.02 μm, giving a good match to the data reported by the PR manufacturer. 2020 artículo científico 1665-6423 https://www.redalyc.org/articulo.oa?id=47471661002 https://www.redalyc.org/journal/474/47471661002/ https://www.redalyc.org/journal/474/47471661002/html/ https://www.redalyc.org/journal/474/47471661002/47471661002.epub https://www.redalyc.org/journal/474/47471661002/movil 10.14482/INDES.30.1.303.661 en http://www.redalyc.org/revista.oa?id=474 Journal of Applied Research and Technology application/pdf Universidad Nacional Autónoma de México Journal of Applied Research and Technology (México) Num.1 Vol.18 |
| format | Artículo científico |
| id | redalyc_47471661002 |
| institution | Redalyc |
| language | en |
| publishDate | 2020 |
| publisher | Universidad Nacional Autónoma de México |
| spellingShingle | Development of a bearing-free, low-vibration vacuum chuck for a spin-coating apparatus E. Gómez-Méndez Ingeniería thin films Spin coater photoresist vacuum chuck mechanical design Development of a bearing-free, low-vibration vacuum chuck for a spin-coating apparatus E. Gómez-Méndez C. M. Posada J. M. Jaramillo-Ocampo Ingeniería thin films Spin coater photoresist vacuum chuck mechanical design This work presents the design and fabrication of two different vacuum chuck systems for a spin-coater apparatus. One of the vacuum chuck designs considered was sealed with toric joints and the other was sealed with bearings. These vacuum chucks were adapted to a DC brushless motor which has a non-perforated shaft. The vacuum chuck with toric joints presented a superior performance when compared to the design with bearings. The best chuck design showed variations in temperature below 1 °C for spin-coating speeds in the range of 100 to 4000 rpm. In all cases, the vibrations of the spin-coating apparatus were measured to be below 1 μm RMS. To test the performance of the spin-coater, photoresist (PR) films were spin-coated at different rotational speeds. At 3000 rpm the measured PR thickness was 0.42 ± 0.02 μm, giving a good match to the data reported by the PR manufacturer. 2020 artículo científico 1665-6423 https://www.redalyc.org/articulo.oa?id=47471661002 https://www.redalyc.org/journal/474/47471661002/ https://www.redalyc.org/journal/474/47471661002/html/ https://www.redalyc.org/journal/474/47471661002/47471661002.epub https://www.redalyc.org/journal/474/47471661002/movil 10.14482/INDES.30.1.303.661 en http://www.redalyc.org/revista.oa?id=474 Journal of Applied Research and Technology application/pdf Universidad Nacional Autónoma de México Journal of Applied Research and Technology (México) Num.1 Vol.18 |
| title | Development of a bearing-free, low-vibration vacuum chuck for a spin-coating apparatus |
| topic | Ingeniería thin films Spin coater photoresist vacuum chuck mechanical design |
| url | https://www.redalyc.org/articulo.oa?id=47471661002 https://www.redalyc.org/journal/474/47471661002/ https://www.redalyc.org/journal/474/47471661002/html/ https://www.redalyc.org/journal/474/47471661002/47471661002.epub https://www.redalyc.org/journal/474/47471661002/movil |