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Bibliographic Details
Main Author: Javier Serrano Pérez
Format: Artículo científico
Language:en
Published: Universidad Nacional Autónoma de México 2020
Subjects:
Online Access:https://www.redalyc.org/articulo.oa?id=47471672002
https://www.redalyc.org/journal/474/47471672002/
https://www.redalyc.org/journal/474/47471672002/html/
https://www.redalyc.org/journal/474/47471672002/47471672002.epub
https://www.redalyc.org/journal/474/47471672002/movil
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_version_ 1866558120868708352
author Javier Serrano Pérez
author_facet Javier Serrano Pérez
contents Alumina layer using low-cost direct liquid injection metal organic chemical vapor deposition (DLI-MOCVD) on AISI 1018 steel. Javier Serrano Pérez Fernando Juárez López Edgar Serrano Pérez Ingeniería MOC CVD alumina direct liquid injection Amorphous alumina layers were deposited on low carbon steel (AISI 1018) substrates by the direct liquid injection metal organic chemical vapor deposition (DLI-MOCVD) technique. For the DLI-MOCVD technique, two temperatures were used: a vaporization chamber temperature of 180 °C and a reaction chamber temperature of 370 °C. Liquid precursor aluminum tri-sec-butoxide was introduced in form of atomized liquid, each pulse of 1 Hz frequency and 3 ms opening time, the solution was pressurized at 40 psi under inert Argon atmosphere. 200 sccm of Argon were used as continuous carrier gas during all the deposition process. Microscopy and XRD techniques were used to characterize the deposited material. The thickness of the alumina coatings was of 100 µm, approximately. 2020 artículo científico 1665-6423 https://www.redalyc.org/articulo.oa?id=47471672002 https://www.redalyc.org/journal/474/47471672002/ https://www.redalyc.org/journal/474/47471672002/html/ https://www.redalyc.org/journal/474/47471672002/47471672002.epub https://www.redalyc.org/journal/474/47471672002/movil 10.14482/INDES.30.1.303.661 en http://www.redalyc.org/revista.oa?id=474 Journal of Applied Research and Technology application/pdf Universidad Nacional Autónoma de México Journal of Applied Research and Technology (México) Num.3 Vol.18
format Artículo científico
id redalyc_47471672002
language en
publishDate 2020
publisher Universidad Nacional Autónoma de México
spellingShingle Alumina layer using low-cost direct liquid injection metal organic chemical vapor deposition (DLI-MOCVD) on AISI 1018 steel.
Javier Serrano Pérez
Ingeniería
MOC
CVD
alumina
direct liquid injection
Alumina layer using low-cost direct liquid injection metal organic chemical vapor deposition (DLI-MOCVD) on AISI 1018 steel. Javier Serrano Pérez Fernando Juárez López Edgar Serrano Pérez Ingeniería MOC CVD alumina direct liquid injection Amorphous alumina layers were deposited on low carbon steel (AISI 1018) substrates by the direct liquid injection metal organic chemical vapor deposition (DLI-MOCVD) technique. For the DLI-MOCVD technique, two temperatures were used: a vaporization chamber temperature of 180 °C and a reaction chamber temperature of 370 °C. Liquid precursor aluminum tri-sec-butoxide was introduced in form of atomized liquid, each pulse of 1 Hz frequency and 3 ms opening time, the solution was pressurized at 40 psi under inert Argon atmosphere. 200 sccm of Argon were used as continuous carrier gas during all the deposition process. Microscopy and XRD techniques were used to characterize the deposited material. The thickness of the alumina coatings was of 100 µm, approximately. 2020 artículo científico 1665-6423 https://www.redalyc.org/articulo.oa?id=47471672002 https://www.redalyc.org/journal/474/47471672002/ https://www.redalyc.org/journal/474/47471672002/html/ https://www.redalyc.org/journal/474/47471672002/47471672002.epub https://www.redalyc.org/journal/474/47471672002/movil 10.14482/INDES.30.1.303.661 en http://www.redalyc.org/revista.oa?id=474 Journal of Applied Research and Technology application/pdf Universidad Nacional Autónoma de México Journal of Applied Research and Technology (México) Num.3 Vol.18
title Alumina layer using low-cost direct liquid injection metal organic chemical vapor deposition (DLI-MOCVD) on AISI 1018 steel.
topic Ingeniería
MOC
CVD
alumina
direct liquid injection
url https://www.redalyc.org/articulo.oa?id=47471672002
https://www.redalyc.org/journal/474/47471672002/
https://www.redalyc.org/journal/474/47471672002/html/
https://www.redalyc.org/journal/474/47471672002/47471672002.epub
https://www.redalyc.org/journal/474/47471672002/movil