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| Format: | Artículo científico |
| Langue: | en |
| Publié: |
Universidad Nacional de Colombia
2018
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| Accès en ligne: | https://www.redalyc.org/articulo.oa?id=49655628009 https://www.redalyc.org/journal/496/49655628009/ https://www.redalyc.org/journal/496/49655628009/html/ https://www.redalyc.org/journal/496/49655628009/49655628009.epub https://www.redalyc.org/journal/496/49655628009/movil |
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| _version_ | 1866558118324862976 |
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| author | Sebastián Ramírez-Ramírez |
| author_facet | Sebastián Ramírez-Ramírez |
| contents | Study of the plasma behavior produced by a vacuum arc discharge for different cathode materials Sebastián Ramírez-Ramírez Daniel Alejandro Sabogal-Suárez Diego Fernando Devia-Narváez Elisabeth Restrepo-Parra Ingeniería modeling arc discharge cathode material plasma static behavior Plasma-assisted techniques have been widely used for deposition of high quality thin films and metallurgical coatings. The glow plasma produced in the region between the electrodes and the chamber wall of a cathodic arc was modeled. The plasma behavior was characterized for different cathode materials that are commonly used in a cathodic arc deposition. The electron temperature, density, and electric potential were found to decrease as function of the distance from the spot region. However, the ion kinetic energy tends to increase due to the acceleration of the ions coming from the bulk region. Our results show that the cathodic arc is not directly affected by the plasma potential of the glow plasma and that the cathode material has an important influence on the plasma behavior, mainly because of the electrical and thermal conductivity of each material. 2018 artículo científico 0012-7353 https://www.redalyc.org/articulo.oa?id=49655628009 https://www.redalyc.org/journal/496/49655628009/ https://www.redalyc.org/journal/496/49655628009/html/ https://www.redalyc.org/journal/496/49655628009/49655628009.epub https://www.redalyc.org/journal/496/49655628009/movil 10.15446/dyna.v85n204.65167 en http://www.redalyc.org/revista.oa?id=496 Dyna application/pdf Universidad Nacional de Colombia Dyna (Colombia) Num.204 Vol.85 |
| format | Artículo científico |
| id | redalyc_49655628009 |
| language | en |
| publishDate | 2018 |
| publisher | Universidad Nacional de Colombia |
| spellingShingle | Study of the plasma behavior produced by a vacuum arc discharge for different cathode materials Sebastián Ramírez-Ramírez Ingeniería modeling arc discharge cathode material plasma static behavior Study of the plasma behavior produced by a vacuum arc discharge for different cathode materials Sebastián Ramírez-Ramírez Daniel Alejandro Sabogal-Suárez Diego Fernando Devia-Narváez Elisabeth Restrepo-Parra Ingeniería modeling arc discharge cathode material plasma static behavior Plasma-assisted techniques have been widely used for deposition of high quality thin films and metallurgical coatings. The glow plasma produced in the region between the electrodes and the chamber wall of a cathodic arc was modeled. The plasma behavior was characterized for different cathode materials that are commonly used in a cathodic arc deposition. The electron temperature, density, and electric potential were found to decrease as function of the distance from the spot region. However, the ion kinetic energy tends to increase due to the acceleration of the ions coming from the bulk region. Our results show that the cathodic arc is not directly affected by the plasma potential of the glow plasma and that the cathode material has an important influence on the plasma behavior, mainly because of the electrical and thermal conductivity of each material. 2018 artículo científico 0012-7353 https://www.redalyc.org/articulo.oa?id=49655628009 https://www.redalyc.org/journal/496/49655628009/ https://www.redalyc.org/journal/496/49655628009/html/ https://www.redalyc.org/journal/496/49655628009/49655628009.epub https://www.redalyc.org/journal/496/49655628009/movil 10.15446/dyna.v85n204.65167 en http://www.redalyc.org/revista.oa?id=496 Dyna application/pdf Universidad Nacional de Colombia Dyna (Colombia) Num.204 Vol.85 |
| title | Study of the plasma behavior produced by a vacuum arc discharge for different cathode materials |
| topic | Ingeniería modeling arc discharge cathode material plasma static behavior |
| url | https://www.redalyc.org/articulo.oa?id=49655628009 https://www.redalyc.org/journal/496/49655628009/ https://www.redalyc.org/journal/496/49655628009/html/ https://www.redalyc.org/journal/496/49655628009/49655628009.epub https://www.redalyc.org/journal/496/49655628009/movil |