Flatness measurement using a grazing incidence interferometer
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| Formato: | Artículo científico |
| Lenguaje: | en |
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Sociedad Mexicana de Física A.C.
2007
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| _version_ | 1876490718693818368 |
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| author | N. Alcalá Ochoa |
| author_facet | N. Alcalá Ochoa |
| contents | Flatness measurement using a grazing incidence interferometer N. Alcalá Ochoa G. Mendiola J.E.A. Landgrave Física, Astronomía y Matemáticas interferometry Optical testing fringe analysis l aser applications The purpose of this work is to report results of flatness measurements using a grazing incidence interferometer. We show that this interferometer provides enough accuracy to measure nominally flat polishing tools and rough surfaces. In order to calculate the deformation of the surface under test, an interferogram is analyzed with digital imaging techniques based on Fourier methods. We found experimentally that the entire surface topography can be recovered with errors lower than ~ 0.6 μm, or ~ λeqv/6, where λeqv = 3.6441 μm is the equivalent wavelength of the interferometer. 2007 artículo científico 0035-001X https://www.redalyc.org/articulo.oa?id=57016046009 en http://www.redalyc.org/revista.oa?id=570 Revista Mexicana de Física application/pdf Sociedad Mexicana de Física A.C. Revista Mexicana de Física (México) Num.1 Vol.53 |
| format | Artículo científico |
| id | redalyc_57016046009 |
| institution | Redalyc |
| language | en |
| publishDate | 2007 |
| publisher | Sociedad Mexicana de Física A.C. |
| spellingShingle | Flatness measurement using a grazing incidence interferometer N. Alcalá Ochoa Física, Astronomía y Matemáticas interferometry Optical testing fringe analysis l aser applications Flatness measurement using a grazing incidence interferometer N. Alcalá Ochoa G. Mendiola J.E.A. Landgrave Física, Astronomía y Matemáticas interferometry Optical testing fringe analysis l aser applications The purpose of this work is to report results of flatness measurements using a grazing incidence interferometer. We show that this interferometer provides enough accuracy to measure nominally flat polishing tools and rough surfaces. In order to calculate the deformation of the surface under test, an interferogram is analyzed with digital imaging techniques based on Fourier methods. We found experimentally that the entire surface topography can be recovered with errors lower than ~ 0.6 μm, or ~ λeqv/6, where λeqv = 3.6441 μm is the equivalent wavelength of the interferometer. 2007 artículo científico 0035-001X https://www.redalyc.org/articulo.oa?id=57016046009 en http://www.redalyc.org/revista.oa?id=570 Revista Mexicana de Física application/pdf Sociedad Mexicana de Física A.C. Revista Mexicana de Física (México) Num.1 Vol.53 |
| title | Flatness measurement using a grazing incidence interferometer |
| topic | Física, Astronomía y Matemáticas interferometry Optical testing fringe analysis l aser applications |
| url | https://www.redalyc.org/articulo.oa?id=57016046009 |