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Characterization of ALN thin films deposited by DC reactive magnetron sputtering

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Dettagli Bibliografici
Autore principale:	M. García-Méndez
Natura:	Artículo científico
Lingua:	en
Pubblicazione:	Sociedad Mexicana de Física A.C. 2008
Soggetti:	Física, Astronomía y Matemáticas AlN thin films Reactive sputtering
Accesso online:	Acceder al recurso
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