Multipactor suppressing titanium nitride thin films analyzed through XPS and AES
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| Format: | Artículo científico |
| Sprache: | en |
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Sociedad Mexicana de Física A.C.
2008
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| _version_ | 1876456909242892288 |
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| author | M. Castro-Colin |
| author_facet | M. Castro-Colin |
| contents | Multipactor suppressing titanium nitride thin films analyzed through XPS and AES M. Castro-Colin W. Durrer J.A. López L.A. Pinales C. Encinas Baca D. Moller Física, Astronomía y Matemáticas XPS AES Thin film multipactor anodization Cathodic-magnetron-deposited titanium nitride films were grown on anodized aluminum substrates and studied via AES and XPS spectroscopies to determine their depth-dependence composition. As it is well known, the native oxide grown on aluminum does not make the substrate impervious to radio frequency damage, and typically a thin film coating is needed to suppress substrate damage. In this article we present the profile composition of titanium nitride films, used as a protective coating for aluminum, that underwent prior conditioning through anodization, observed after successive sputtering stages. 2008 artículo científico 0035-001X https://www.redalyc.org/articulo.oa?id=57019064009 en http://www.redalyc.org/revista.oa?id=570 Revista Mexicana de Física application/pdf Sociedad Mexicana de Física A.C. Revista Mexicana de Física (México) Num.1 Vol.54 |
| format | Artículo científico |
| id | redalyc_57019064009 |
| institution | Redalyc |
| language | en |
| publishDate | 2008 |
| publisher | Sociedad Mexicana de Física A.C. |
| spellingShingle | Multipactor suppressing titanium nitride thin films analyzed through XPS and AES M. Castro-Colin Física, Astronomía y Matemáticas XPS AES Thin film multipactor anodization Multipactor suppressing titanium nitride thin films analyzed through XPS and AES M. Castro-Colin W. Durrer J.A. López L.A. Pinales C. Encinas Baca D. Moller Física, Astronomía y Matemáticas XPS AES Thin film multipactor anodization Cathodic-magnetron-deposited titanium nitride films were grown on anodized aluminum substrates and studied via AES and XPS spectroscopies to determine their depth-dependence composition. As it is well known, the native oxide grown on aluminum does not make the substrate impervious to radio frequency damage, and typically a thin film coating is needed to suppress substrate damage. In this article we present the profile composition of titanium nitride films, used as a protective coating for aluminum, that underwent prior conditioning through anodization, observed after successive sputtering stages. 2008 artículo científico 0035-001X https://www.redalyc.org/articulo.oa?id=57019064009 en http://www.redalyc.org/revista.oa?id=570 Revista Mexicana de Física application/pdf Sociedad Mexicana de Física A.C. Revista Mexicana de Física (México) Num.1 Vol.54 |
| title | Multipactor suppressing titanium nitride thin films analyzed through XPS and AES |
| topic | Física, Astronomía y Matemáticas XPS AES Thin film multipactor anodization |
| url | https://www.redalyc.org/articulo.oa?id=57019064009 |