Refractive index of multiline nanosecond laser-induced periodic surface structures and porous silicon

Fuente: Redalyc
Saved in:
Bibliographic Details
Main Author: J.E. Alfonso-Orjuela
Format: Artículo científico
Language:en
Published: Sociedad Mexicana de Física A.C. 2011
Subjects:
Online Access:
Tags: Add Tag
No Tags, Be the first to tag this record!
_version_ 1876488575589023744
author J.E. Alfonso-Orjuela
author_facet J.E. Alfonso-Orjuela
contents Refractive index of multiline nanosecond laser-induced periodic surface structures and porous silicon J.E. Alfonso-Orjuela D.F. Andrade-Zambrano J.M. Arroyo-Osorio Física, Astronomía y Matemáticas silicon Laser ablation refractive index periodic structures porous silicon (PS) To study the effect of multiline laser processing in the optical response of silicon, a set of p-type single-crystalline silicon wafers with 0.01 to 0.02 ­m resistivity, 525 ¹m thickness, and [111] orientation, was irradiated with a multiline Nd:YAG pulsed laser (1064, 532 and 355 nm) applying energies from 310 to 3100 J. A group of those surfaces was produced using argon gas blowing, while other group was manufactured in free atmosphere. Using confocal microscopy, it was observed that the gas-protected samples shown surface periodic structures in the form of ripples with an average pitch of 547 nm. Trough diffuse reflectance tests it was determined that proportionally to the energy supplied in the laser processing, these surfaces reflect between 10% and 30% in the UV region and between 60% and 80% in the IR region. On the other hand, the free atmosphere-made surfaces presented structures and diffraction properties characteristic of porous silicon (PS). The refractive index of the surfaces with periodic structures was calculated based on the diffuse reflectance measures while that of PS surfaces was calculated using the surface voids fraction (pores) determined with the confocal microscope image analysis software. 2011 artículo científico 0035-001X https://www.redalyc.org/articulo.oa?id=57021213002 en http://www.redalyc.org/revista.oa?id=570 Revista Mexicana de Física application/pdf Sociedad Mexicana de Física A.C. Revista Mexicana de Física (México) Num.6 Vol.57
format Artículo científico
id redalyc_57021213002
institution Redalyc
language en
publishDate 2011
publisher Sociedad Mexicana de Física A.C.
spellingShingle Refractive index of multiline nanosecond laser-induced periodic surface structures and porous silicon
J.E. Alfonso-Orjuela
Física, Astronomía y Matemáticas
silicon
Laser ablation
refractive index
periodic structures
porous silicon (PS)
Refractive index of multiline nanosecond laser-induced periodic surface structures and porous silicon J.E. Alfonso-Orjuela D.F. Andrade-Zambrano J.M. Arroyo-Osorio Física, Astronomía y Matemáticas silicon Laser ablation refractive index periodic structures porous silicon (PS) To study the effect of multiline laser processing in the optical response of silicon, a set of p-type single-crystalline silicon wafers with 0.01 to 0.02 ­m resistivity, 525 ¹m thickness, and [111] orientation, was irradiated with a multiline Nd:YAG pulsed laser (1064, 532 and 355 nm) applying energies from 310 to 3100 J. A group of those surfaces was produced using argon gas blowing, while other group was manufactured in free atmosphere. Using confocal microscopy, it was observed that the gas-protected samples shown surface periodic structures in the form of ripples with an average pitch of 547 nm. Trough diffuse reflectance tests it was determined that proportionally to the energy supplied in the laser processing, these surfaces reflect between 10% and 30% in the UV region and between 60% and 80% in the IR region. On the other hand, the free atmosphere-made surfaces presented structures and diffraction properties characteristic of porous silicon (PS). The refractive index of the surfaces with periodic structures was calculated based on the diffuse reflectance measures while that of PS surfaces was calculated using the surface voids fraction (pores) determined with the confocal microscope image analysis software. 2011 artículo científico 0035-001X https://www.redalyc.org/articulo.oa?id=57021213002 en http://www.redalyc.org/revista.oa?id=570 Revista Mexicana de Física application/pdf Sociedad Mexicana de Física A.C. Revista Mexicana de Física (México) Num.6 Vol.57
title Refractive index of multiline nanosecond laser-induced periodic surface structures and porous silicon
topic Física, Astronomía y Matemáticas
silicon
Laser ablation
refractive index
periodic structures
porous silicon (PS)
url https://www.redalyc.org/articulo.oa?id=57021213002