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| Format: | Artículo científico |
| Language: | en |
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Sociedad Mexicana de Física A.C.
2013
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| Online Access: | https://www.redalyc.org/articulo.oa?id=57027861009 |
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| _version_ | 1866558298618068992 |
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| author | F. de Moure-Flores |
| author_facet | F. de Moure-Flores |
| contents | SnO2:F thin films deposited by RF magnetron sputtering: effect of the SnF2 amount in the target on the physical properties F. de Moure-Flores A. Guillén-Cervantes K.E. Nieto-Zepeda J.G. Quiñones-Galván A. Hernández-Hernández M. de la L. Olvera M. Meléndez-Lira Física, Astronomía y Matemáticas doped tin oxide transparent electrodes RF magnetron sputtering transparent conducting oxide SnO2:F thin films were prepared by RF magnetron sputtering onto glass substrates using SnF2 as fluorine source. The films were deposited under a mixed argon/hydrogen atmosphere at a substrate temperature of 500◦ C. The X-ray diffraction shows that polycrystalline films were grown with a phases mixture of SnO2 and SnO. The optical transmittance is between 80 and 90%. The physical properties of the films suggest that SnO2 thin films grown with small SnF2 content in the target can be considered as candidates for transparent electrodes. 2013 artículo científico 0035-001X https://www.redalyc.org/articulo.oa?id=57027861009 en http://www.redalyc.org/revista.oa?id=570 Revista Mexicana de Física application/pdf Sociedad Mexicana de Física A.C. Revista Mexicana de Física (México) Num.4 Vol.59 |
| format | Artículo científico |
| id | redalyc_57027861009 |
| language | en |
| publishDate | 2013 |
| publisher | Sociedad Mexicana de Física A.C. |
| spellingShingle | SnO2:F thin films deposited by RF magnetron sputtering: effect of the SnF2 amount in the target on the physical properties F. de Moure-Flores Física, Astronomía y Matemáticas doped tin oxide transparent electrodes RF magnetron sputtering transparent conducting oxide SnO2:F thin films deposited by RF magnetron sputtering: effect of the SnF2 amount in the target on the physical properties F. de Moure-Flores A. Guillén-Cervantes K.E. Nieto-Zepeda J.G. Quiñones-Galván A. Hernández-Hernández M. de la L. Olvera M. Meléndez-Lira Física, Astronomía y Matemáticas doped tin oxide transparent electrodes RF magnetron sputtering transparent conducting oxide SnO2:F thin films were prepared by RF magnetron sputtering onto glass substrates using SnF2 as fluorine source. The films were deposited under a mixed argon/hydrogen atmosphere at a substrate temperature of 500◦ C. The X-ray diffraction shows that polycrystalline films were grown with a phases mixture of SnO2 and SnO. The optical transmittance is between 80 and 90%. The physical properties of the films suggest that SnO2 thin films grown with small SnF2 content in the target can be considered as candidates for transparent electrodes. 2013 artículo científico 0035-001X https://www.redalyc.org/articulo.oa?id=57027861009 en http://www.redalyc.org/revista.oa?id=570 Revista Mexicana de Física application/pdf Sociedad Mexicana de Física A.C. Revista Mexicana de Física (México) Num.4 Vol.59 |
| title | SnO2:F thin films deposited by RF magnetron sputtering: effect of the SnF2 amount in the target on the physical properties |
| topic | Física, Astronomía y Matemáticas doped tin oxide transparent electrodes RF magnetron sputtering transparent conducting oxide |
| url | https://www.redalyc.org/articulo.oa?id=57027861009 |