Cover Image

Ciliary motion in PECVD silicon carbide and silicon oxynitride microstructures

Fuente: Redalyc

Saved in:

Bibliographic Details
Main Author:	G. Rehder
Format:	Artículo científico
Language:	en
Published:	Sociedad Mexicana de Física A.C. 2006
Subjects:	Física, Astronomía y Matemáticas MEMS Joule effect silicon carbide
Online Access:	Acceder al recurso
Tags:	Add Tag No Tags, Be the first to tag this record!

Similar Items

Theoretical study of the electronic band gap in B-SiC nanowires
by: A. Trejo
Published: (2011)

Early fault detection in SiC-MOSFET with application in boost converter
by: Leobardo Hernández-González
Published: (2018)

Refractive index evaluation of porous silicon using bragg reflectors
by: D. Estrada-Wiese
Published: (2018)

FTIR and photoluminescence studies of porous silicon layers oxidized in controlled water vapor conditions
by: M.A. Vásquez-A.
Published: (2007)

Photovoltage and J-V features of porous silicon
by: MC. Arenas
Published: (2008)

Cejas_Alumina_Slag_Capture_Propulsion_2025
by: Sebastian Nahuel, Cejas Gonzalez
Published: (2026)

Refractive index of multiline nanosecond laser-induced periodic surface structures and porous silicon
by: J.E. Alfonso-Orjuela
Published: (2011)

Dose dependent shift of the TL glow peak in a silicon rich oxide (SRO) film
by: T.M. Piters
Published: (2011)

Integration of bio, nano, micro and cogno in biosensor devices for human health applications
by: L.M. Lechuga
Published: (2005)

Decoherence from qubit-qubit dipolar interaction in an all silicon quantum computer
by: M. Avila
Published: (2009)

Design and simulation of a membranes-based acoustic sensors array for cochlear implant applications
by: G. Quiroz
Published: (2014)

Electrical transport phenomena in nanostructured porous-silicon films
by: M. A. Vasquez
Published: (2018)

Procesos de grabado seco de silicio monocristalino con alta velocidad de grabado y anisotropía para su aplicación en la fabricación de MEMS
by: C. Álvarez-Macias
Published: (2007)

Películas delgadas de carburo de germanio preparadas mediante ablación por láser pulsado
by: W. de la Cruz
Published: (2003)

One step a-Si:H TFT’S with PECVD SiOx Ny gate insulator
by: K.F. Albertin
Published: (2006)

Analysis of the potential upon the floating gate of an FGMOSFET used as a gas sensor
by: M. A. Reyes-Barranca
Published: (2008)

Micro sensor-actuador térmico sin baterías para aplicaciones en microelectrónica de ultra-bajo consumo de potencia
by: J. Varona
Published: (2013)

Study of the effect of silver in the mechanical properties and electrical conductivity of duralumins (Al-4%Cu-0.5%Mg)
by: Reinaldo Correa-Avendaño
Published: (2014)

Semiempirical supercell approach to calculate the electronic and optical properties of Si quantum wires
by: A. Miranda
Published: (2007)

Restrained relaxation of stress in a MBE-grown thin film of CaF2 on (111) silicon
by: E. Torres Tapia
Published: (2002)

Analysis of MEMS structures to identify their frequency response oriented to acoustic applications
by: F. J. Ibarra-Villegas
Published: (2015)

Integrated sensors and microsystems
by: F.J. Ramirez–Fernández
Published: (2006)

Design of capacitive MEMS transverse-comb accelerometers with test hardware
by: F. J. Ibarra-Villegas
Published: (2013)

Thermal model for a microhot plate used in a MEM gas sensor
by: M. Alfredo Reyes-Barranca
Published: (2008)

Modelado analítico de un micro generador de potencia basado en tecnología MEMS y materiales piezoeléctricos
by: R. I. Rincon-Jara
Published: (2012)

Diseño de un dispositivo sensor de masa tipo MEMS basado en microvigas en voladizo de polisilicio
by: R. Sánchez-Fraga
Published: (2014)

Thermal Diffusivity Measurement for p-Si and Ag/p-Si by Photoacoustic Technique
by: Mohammed Jabbar Hussein
Published: (2015)

Fabrication and characterization of ZnO:Zn(n+)/Porous-Silicon/Si(p) heterojunctions for white light emitting diodes
by: M.A. Vásquez-A
Published: (2016)

Structural and electro-thermal analysis of a magnetic resonant sensor structure based on Lorentz force
by: E. Morales-González
Published: (2006)

Packaging investigation and study for optical interfacing of micro components with optical fibers - Part II
by: Jose Mireles Jr.
Published: (2007)

Packaging investigation and study for optical interfacing of micro components with optical fibers - Part I
by: Jose Mireles Jr.
Published: (2007)

Packaging investigation and study for optical interfacing of micro components with optical fibers - Part II
by: Jose Mireles Jr.
Published: (2008)

Entwicklung und Charakterisierung von Siliziumnitrid-/Siliziumkarbidkompositen für den Einsatz in tribologisch hochbeanspruchten Gleitsystemen
by: Zielonka, Paul S.
Published: (2023)

Influence of the Current Density and Resistivity on the Optical Properties of P-Type Porous Silicon Thin Films Fabricated by the Electrochemical Anodizing Method
by: F. Castillejo
Published: (2006)

A 540µT-1 silicon-based MAGFET
by: M.A. Dávalos-Santana
Published: (2007)

Análisis y caracterización de un acelerómetro capacitivo fabricado con tecnología polymump's
by: R. I Rincon-Jara
Published: (2010)

Optical properties, infrared spectroscopy and photoluminescence at low temperature of LPCVD silicon oxynitride thin films
by: Wilfrido Calleja
Published: (1999)

Production and characterization of niobium carbide coatings produced on tool steels by thermoreactive deposition/diffusion
by: F.E. Castillejo
Published: (2014)

Pulsating hydromagnetic flow of Au-blood micropolar nanofluid in a channel with Ohmic heating, thermal radiation and heat source/sink
by: Devendiran Rajkumar
Published: (2022)

Microstructure, morphology, adhesion and tribologic al behavior of sputtered niobium carbide and bismuth films on tool steel
by: L. A. Ardila
Published: (2014)