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One step a-Si:H TFT’S with PECVD SiOx Ny gate insulator

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Bibliographic Details
Main Author:	K.F. Albertin
Format:	Artículo científico
Language:	en
Published:	Sociedad Mexicana de Física A.C. 2006
Subjects:	Física, Astronomía y Matemáticas One mask step silicon oxynitride thin film transistors
Online Access:	Acceder al recurso
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