Effects of deposition parameters on the optical and microstructural characteristics of sputtered deposited nanocrystalline ZnO thin films
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| Format: | Artículo científico |
| Langue: | en |
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Sociedad Mexicana de Física A.C.
2007
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| _version_ | 1876482511021801472 |
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| author | D. Cornejo Monroy |
| author_facet | D. Cornejo Monroy |
| contents | Effects of deposition parameters on the optical and microstructural characteristics of sputtered deposited nanocrystalline ZnO thin films D. Cornejo Monroy J. F. Sánchez-Ramírez M. Herrera-Zaldívar U. Pal Física, Astronomía y Matemáticas sputtering ZnO thin films microstructures optical properties Nanocrystalline ZnO thin films were deposited on silicon and quartz substrates at different working pressures and different r.f. powers to study their structural and optical properties. The films were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM) and optical absorption spectroscopy techniques. The ZnO films were of polycrystalline nature with very small grain size. All the ZnO films were of hexagonal wurtzite structure. While the microstructural characteristics of the films depended strongly on the deposition parameters, their optical properties did not vary significantly. Films deposited at higher working pressures were of bigger grain size, irrespective of the nature of the substrate. In general, increase of r.f. power decreases the negative stress in the films. 2007 artículo científico 0035-001X https://www.redalyc.org/articulo.oa?id=57028299005 en http://www.redalyc.org/revista.oa?id=570 Revista Mexicana de Física application/pdf Sociedad Mexicana de Física A.C. Revista Mexicana de Física (México) Num.5 Vol.53 |
| format | Artículo científico |
| id | redalyc_57028299005 |
| institution | Redalyc |
| language | en |
| publishDate | 2007 |
| publisher | Sociedad Mexicana de Física A.C. |
| spellingShingle | Effects of deposition parameters on the optical and microstructural characteristics of sputtered deposited nanocrystalline ZnO thin films D. Cornejo Monroy Física, Astronomía y Matemáticas sputtering ZnO thin films microstructures optical properties Effects of deposition parameters on the optical and microstructural characteristics of sputtered deposited nanocrystalline ZnO thin films D. Cornejo Monroy J. F. Sánchez-Ramírez M. Herrera-Zaldívar U. Pal Física, Astronomía y Matemáticas sputtering ZnO thin films microstructures optical properties Nanocrystalline ZnO thin films were deposited on silicon and quartz substrates at different working pressures and different r.f. powers to study their structural and optical properties. The films were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM) and optical absorption spectroscopy techniques. The ZnO films were of polycrystalline nature with very small grain size. All the ZnO films were of hexagonal wurtzite structure. While the microstructural characteristics of the films depended strongly on the deposition parameters, their optical properties did not vary significantly. Films deposited at higher working pressures were of bigger grain size, irrespective of the nature of the substrate. In general, increase of r.f. power decreases the negative stress in the films. 2007 artículo científico 0035-001X https://www.redalyc.org/articulo.oa?id=57028299005 en http://www.redalyc.org/revista.oa?id=570 Revista Mexicana de Física application/pdf Sociedad Mexicana de Física A.C. Revista Mexicana de Física (México) Num.5 Vol.53 |
| title | Effects of deposition parameters on the optical and microstructural characteristics of sputtered deposited nanocrystalline ZnO thin films |
| topic | Física, Astronomía y Matemáticas sputtering ZnO thin films microstructures optical properties |
| url | https://www.redalyc.org/articulo.oa?id=57028299005 |