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| Formato: | Artículo científico |
| Lenguaje: | en |
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Sociedad Mexicana de Física A.C.
2007
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| Acceso en línea: | https://www.redalyc.org/articulo.oa?id=57036163070 |
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- Compositional and structural characterization of silicon nanoparticles embedded in silicon rich oxide J.A. Luna-López M. Aceves-Mijares O. Malik Z. Yu A. Morales C. Domínguez J. Rickards Física, Astronomía y Matemáticas AFM RBS XPS HRTEM nanocrystals Silicon Rich Oxide (SRO) is a dielectric material that contains Si nanoparticles, thus showing novel physical characteristics which permitsits use in optoelectronic devices. In this work, the composition and structure at the surface, volume and Si/SRO interface of the SRO filmsdeposited on c-Si substrates were studied. Different techniques, such as Atomic Force Microscopy (AFM), High Resolution TransmissionElectronic Microscopy (HRTEM), Rutherford Backscattering Spectrometry (RBS) and X-ray Photoelectron Spectroscopy (XPS) were usedin the study. XPS and RBS reveal that the composition of the films varied with respect to the gas flow ratio. These results allow us to correlatethe compositional and structural [as size of the grains (roughness), nc-Si size and different oxidation states of Si] changes of the surface,volume and interface from the SRO films with the flow ratio (Ro) used during the deposition process and with the high temperature annealingtime. 2007 artículo científico 0035-001X https://www.redalyc.org/articulo.oa?id=57036163070 en http://www.redalyc.org/revista.oa?id=570 Revista Mexicana de Física application/pdf Sociedad Mexicana de Física A.C. Revista Mexicana de Física (México) Num.7 Vol.53