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Fabrication and characterization of un-cooled micro-bolometers based on silicon germanium thin films obtained by low frequency plasma deposition

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Détails bibliographiques
Auteur principal:	M. Moreno
Format:	Artículo científico
Langue:	en
Publié:	Sociedad Mexicana de Física A.C. 2007
Sujets:	Física, Astronomía y Matemáticas Germanium IR detectors plasma enhanced chemical vapor deposition
Accès en ligne:	Acceder al recurso
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