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Fabrication and characterization of un-cooled micro-bolometers based on silicon germanium thin films obtained by low frequency plasma deposition

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Dettagli Bibliografici
Autore principale:	M. Moreno
Natura:	Artículo científico
Lingua:	en
Pubblicazione:	Sociedad Mexicana de Física A.C. 2007
Soggetti:	Física, Astronomía y Matemáticas Germanium IR detectors plasma enhanced chemical vapor deposition
Accesso online:	Acceder al recurso
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