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Bibliographic Details
Main Author:	A.L. Leal-Cruz
Format:	Artículo científico
Language:	en
Published:	Sociedad Mexicana de Física A.C. 2008
Subjects:	Física, Astronomía y Matemáticas CVD gas and ¯ Si3N4 Thermodynamics
Online Access:	https://www.redalyc.org/articulo.oa?id=57054305
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