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| Format: | Artículo científico |
| Language: | en |
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Sociedad Mexicana de Física A.C.
2008
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| Online Access: | https://www.redalyc.org/articulo.oa?id=57054312 |
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| _version_ | 1866558554208468992 |
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| author | S. J. Pérez Ruiz |
| author_facet | S. J. Pérez Ruiz |
| contents | Optical sensing technique for Youngs modulus measurements in piezoelectric materials S. J. Pérez Ruiz J.A. Montero Díaz S. Alcántara Iniesta R. Castañeda G. P. R. Hernández Física, Astronomía y Matemáticas Youngs Modulus piezoelectric cantilever In the design of microsensors using microelectromechanical system (MEMS) technology, it is necessary to know the elastic properties ofthe materials employed in their fabrication. Reliable mechanical properties of the materials are critical to the safety and correct functioningof these microdevices. Mechanical testing of microstructures that are only a few microns thick requires novel techniques and specializedprocedures for preparation and handling. In this paper a simplified optic sensing is used to measure the Youngs modulus in piezoelectriccantilever. This optical technique was chosen because it is the most appropriate when working with small devices, besides being easilyimplemented and low cost 2008 artículo científico 0035-001X https://www.redalyc.org/articulo.oa?id=57054312 en http://www.redalyc.org/revista.oa?id=570 Revista Mexicana de Física application/pdf Sociedad Mexicana de Física A.C. Revista Mexicana de Física (México) Num.3 Vol.54 |
| format | Artículo científico |
| id | redalyc_57054312 |
| language | en |
| publishDate | 2008 |
| publisher | Sociedad Mexicana de Física A.C. |
| spellingShingle | Optical sensing technique for Youngs modulus measurements in piezoelectric materials S. J. Pérez Ruiz Física, Astronomía y Matemáticas Youngs Modulus piezoelectric cantilever Optical sensing technique for Youngs modulus measurements in piezoelectric materials S. J. Pérez Ruiz J.A. Montero Díaz S. Alcántara Iniesta R. Castañeda G. P. R. Hernández Física, Astronomía y Matemáticas Youngs Modulus piezoelectric cantilever In the design of microsensors using microelectromechanical system (MEMS) technology, it is necessary to know the elastic properties ofthe materials employed in their fabrication. Reliable mechanical properties of the materials are critical to the safety and correct functioningof these microdevices. Mechanical testing of microstructures that are only a few microns thick requires novel techniques and specializedprocedures for preparation and handling. In this paper a simplified optic sensing is used to measure the Youngs modulus in piezoelectriccantilever. This optical technique was chosen because it is the most appropriate when working with small devices, besides being easilyimplemented and low cost 2008 artículo científico 0035-001X https://www.redalyc.org/articulo.oa?id=57054312 en http://www.redalyc.org/revista.oa?id=570 Revista Mexicana de Física application/pdf Sociedad Mexicana de Física A.C. Revista Mexicana de Física (México) Num.3 Vol.54 |
| title | Optical sensing technique for Youngs modulus measurements in piezoelectric materials |
| topic | Física, Astronomía y Matemáticas Youngs Modulus piezoelectric cantilever |
| url | https://www.redalyc.org/articulo.oa?id=57054312 |