Structural and morphological properties of TiO2thin films prepared by spray pyrolysis
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| Format: | Artículo científico |
| Language: | en |
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Sociedad Mexicana de Física A.C.
2004
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| _version_ | 1876447286763978752 |
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| author | A. Conde Gallardo |
| author_facet | A. Conde Gallardo |
| contents | Structural and morphological properties of TiO2thin films prepared by spray pyrolysis A. Conde Gallardo N. Castillo D. Olguín S. Jiménez Sandoval Física, Astronomía y Matemáticas TiO2thin films spray pyrolysis Chemical vapor deposition In the present work the ultrasonic spray pyrolysis technique was employed to produce TiO2 thin films on fused quartz and on siliconsubstrates. An aerosol, generated ultrasonically, of titanium diisopropoxide was employed in the deposition experiments. The crystallizationprocess of the as deposited samples was studied by X-Ray Difraction (XRD), Raman spectroscopy (RS), Atomic Force Microscopy (AFM),and optical transmission spectroscopies (TS). The results show that spray pyrolysis technique is able to produce films with smooth surfaceand good crystalline properties. When deposition temperatures were below 400±C, the films grow with a flat surface (roughness »5 ° A) butin amorphous phase; while for equal or higher values to this temperature, the films develop a crystalline phase corresponding to the TiO2anatase phase, but the surface roughness is increased up to »225 ° A. After annealing at 750±C, the samples deposited on Si show a partialtransition to rutile phase preferentially oriented in (111) direction; while, under a similar annealing, those films deposited on fused quartz do not show any phase transition. 2004 artículo científico 0035-001X https://www.redalyc.org/articulo.oa?id=57062811 en http://www.redalyc.org/revista.oa?id=570 Revista Mexicana de Física application/pdf Sociedad Mexicana de Física A.C. Revista Mexicana de Física (México) Num.Re4 Vol.50 |
| format | Artículo científico |
| id | redalyc_57062811 |
| institution | Redalyc |
| language | en |
| publishDate | 2004 |
| publisher | Sociedad Mexicana de Física A.C. |
| spellingShingle | Structural and morphological properties of TiO2thin films prepared by spray pyrolysis A. Conde Gallardo Física, Astronomía y Matemáticas TiO2thin films spray pyrolysis Chemical vapor deposition Structural and morphological properties of TiO2thin films prepared by spray pyrolysis A. Conde Gallardo N. Castillo D. Olguín S. Jiménez Sandoval Física, Astronomía y Matemáticas TiO2thin films spray pyrolysis Chemical vapor deposition In the present work the ultrasonic spray pyrolysis technique was employed to produce TiO2 thin films on fused quartz and on siliconsubstrates. An aerosol, generated ultrasonically, of titanium diisopropoxide was employed in the deposition experiments. The crystallizationprocess of the as deposited samples was studied by X-Ray Difraction (XRD), Raman spectroscopy (RS), Atomic Force Microscopy (AFM),and optical transmission spectroscopies (TS). The results show that spray pyrolysis technique is able to produce films with smooth surfaceand good crystalline properties. When deposition temperatures were below 400±C, the films grow with a flat surface (roughness »5 ° A) butin amorphous phase; while for equal or higher values to this temperature, the films develop a crystalline phase corresponding to the TiO2anatase phase, but the surface roughness is increased up to »225 ° A. After annealing at 750±C, the samples deposited on Si show a partialtransition to rutile phase preferentially oriented in (111) direction; while, under a similar annealing, those films deposited on fused quartz do not show any phase transition. 2004 artículo científico 0035-001X https://www.redalyc.org/articulo.oa?id=57062811 en http://www.redalyc.org/revista.oa?id=570 Revista Mexicana de Física application/pdf Sociedad Mexicana de Física A.C. Revista Mexicana de Física (México) Num.Re4 Vol.50 |
| title | Structural and morphological properties of TiO2thin films prepared by spray pyrolysis |
| topic | Física, Astronomía y Matemáticas TiO2thin films spray pyrolysis Chemical vapor deposition |
| url | https://www.redalyc.org/articulo.oa?id=57062811 |