Lock-in amplifier-based rotating-analyzer spectroscopic ellipsometer with micro-controlled angular frequency
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| Natura: | Artículo científico |
| Lingua: | en |
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Sociedad Mexicana de Física A.C.
2005
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| _version_ | 1876480808844263424 |
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| author | J. M. Flores-Camacho |
| author_facet | J. M. Flores-Camacho |
| contents | Lock-in amplifier-based rotating-analyzer spectroscopic ellipsometer with micro-controlled angular frequency J. M. Flores-Camacho O. F. Núñez-Olvera G. Rodríguez-Pedroza A. Lastras Martínez L. F. Lastras-Martínez Física, Astronomía y Matemáticas Ellipsometers control systems dielectric function optical properties of thin films We report on the development of a full operational rotating analyzer spectroscopic ellipsometer. This instrument employs a phase-sensitiveamplifier to process the optical signal as an alternative to Fast Fourier Transform analysis. We describe electronic hardware designed tostabilize the rotation frequency of the analyzer prism as well as to drive the device for the positioning of the polarizer prism azimuth. Theellipsometer allows for dielectric function measurement in the energy range from 1.7-5.5 eV, in both ambient air and Ultra High Vacuum(UHV). UHV measurements can be carried out at a temperature as low as 150 K. To evaluate the ellipsometer performance we present resultsof the determination of the complex dielectric function of a number of semiconductors, namely, GaSb, GaAs, InGaAs, CdTe and CdHgTe. 2005 artículo científico 0035-001X https://www.redalyc.org/articulo.oa?id=57063909 https://www.redalyc.org/journal/570/57063909/ https://www.redalyc.org/journal/570/57063909/html/ https://www.redalyc.org/journal/570/57063909/57063909.epub https://www.redalyc.org/journal/570/57063909/movil en http://www.redalyc.org/revista.oa?id=570 Revista Mexicana de Física application/pdf Sociedad Mexicana de Física A.C. Revista Mexicana de Física (México) Num.3 Vol.51 |
| format | Artículo científico |
| id | redalyc_57063909 |
| institution | Redalyc |
| language | en |
| publishDate | 2005 |
| publisher | Sociedad Mexicana de Física A.C. |
| spellingShingle | Lock-in amplifier-based rotating-analyzer spectroscopic ellipsometer with micro-controlled angular frequency J. M. Flores-Camacho Física, Astronomía y Matemáticas Ellipsometers control systems dielectric function optical properties of thin films Lock-in amplifier-based rotating-analyzer spectroscopic ellipsometer with micro-controlled angular frequency J. M. Flores-Camacho O. F. Núñez-Olvera G. Rodríguez-Pedroza A. Lastras Martínez L. F. Lastras-Martínez Física, Astronomía y Matemáticas Ellipsometers control systems dielectric function optical properties of thin films We report on the development of a full operational rotating analyzer spectroscopic ellipsometer. This instrument employs a phase-sensitiveamplifier to process the optical signal as an alternative to Fast Fourier Transform analysis. We describe electronic hardware designed tostabilize the rotation frequency of the analyzer prism as well as to drive the device for the positioning of the polarizer prism azimuth. Theellipsometer allows for dielectric function measurement in the energy range from 1.7-5.5 eV, in both ambient air and Ultra High Vacuum(UHV). UHV measurements can be carried out at a temperature as low as 150 K. To evaluate the ellipsometer performance we present resultsof the determination of the complex dielectric function of a number of semiconductors, namely, GaSb, GaAs, InGaAs, CdTe and CdHgTe. 2005 artículo científico 0035-001X https://www.redalyc.org/articulo.oa?id=57063909 https://www.redalyc.org/journal/570/57063909/ https://www.redalyc.org/journal/570/57063909/html/ https://www.redalyc.org/journal/570/57063909/57063909.epub https://www.redalyc.org/journal/570/57063909/movil en http://www.redalyc.org/revista.oa?id=570 Revista Mexicana de Física application/pdf Sociedad Mexicana de Física A.C. Revista Mexicana de Física (México) Num.3 Vol.51 |
| title | Lock-in amplifier-based rotating-analyzer spectroscopic ellipsometer with micro-controlled angular frequency |
| topic | Física, Astronomía y Matemáticas Ellipsometers control systems dielectric function optical properties of thin films |
| url | https://www.redalyc.org/articulo.oa?id=57063909 https://www.redalyc.org/journal/570/57063909/ https://www.redalyc.org/journal/570/57063909/html/ https://www.redalyc.org/journal/570/57063909/57063909.epub https://www.redalyc.org/journal/570/57063909/movil |