Lock-in amplifier-based rotating-analyzer spectroscopic ellipsometer with micro-controlled angular frequency

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Autore principale: J. M. Flores-Camacho
Natura: Artículo científico
Lingua:en
Pubblicazione: Sociedad Mexicana de Física A.C. 2005
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author J. M. Flores-Camacho
author_facet J. M. Flores-Camacho
contents Lock-in amplifier-based rotating-analyzer spectroscopic ellipsometer with micro-controlled angular frequency J. M. Flores-Camacho O. F. Núñez-Olvera G. Rodríguez-Pedroza A. Lastras Martínez L. F. Lastras-Martínez Física, Astronomía y Matemáticas Ellipsometers control systems dielectric function optical properties of thin films We report on the development of a full operational rotating analyzer spectroscopic ellipsometer. This instrument employs a phase-sensitiveamplifier to process the optical signal as an alternative to Fast Fourier Transform analysis. We describe electronic hardware designed tostabilize the rotation frequency of the analyzer prism as well as to drive the device for the positioning of the polarizer prism azimuth. Theellipsometer allows for dielectric function measurement in the energy range from 1.7-5.5 eV, in both ambient air and Ultra High Vacuum(UHV). UHV measurements can be carried out at a temperature as low as 150 K. To evaluate the ellipsometer performance we present resultsof the determination of the complex dielectric function of a number of semiconductors, namely, GaSb, GaAs, InGaAs, CdTe and CdHgTe. 2005 artículo científico 0035-001X https://www.redalyc.org/articulo.oa?id=57063909 https://www.redalyc.org/journal/570/57063909/ https://www.redalyc.org/journal/570/57063909/html/ https://www.redalyc.org/journal/570/57063909/57063909.epub https://www.redalyc.org/journal/570/57063909/movil en http://www.redalyc.org/revista.oa?id=570 Revista Mexicana de Física application/pdf Sociedad Mexicana de Física A.C. Revista Mexicana de Física (México) Num.3 Vol.51
format Artículo científico
id redalyc_57063909
institution Redalyc
language en
publishDate 2005
publisher Sociedad Mexicana de Física A.C.
spellingShingle Lock-in amplifier-based rotating-analyzer spectroscopic ellipsometer with micro-controlled angular frequency
J. M. Flores-Camacho
Física, Astronomía y Matemáticas
Ellipsometers
control systems
dielectric function
optical properties of thin films
Lock-in amplifier-based rotating-analyzer spectroscopic ellipsometer with micro-controlled angular frequency J. M. Flores-Camacho O. F. Núñez-Olvera G. Rodríguez-Pedroza A. Lastras Martínez L. F. Lastras-Martínez Física, Astronomía y Matemáticas Ellipsometers control systems dielectric function optical properties of thin films We report on the development of a full operational rotating analyzer spectroscopic ellipsometer. This instrument employs a phase-sensitiveamplifier to process the optical signal as an alternative to Fast Fourier Transform analysis. We describe electronic hardware designed tostabilize the rotation frequency of the analyzer prism as well as to drive the device for the positioning of the polarizer prism azimuth. Theellipsometer allows for dielectric function measurement in the energy range from 1.7-5.5 eV, in both ambient air and Ultra High Vacuum(UHV). UHV measurements can be carried out at a temperature as low as 150 K. To evaluate the ellipsometer performance we present resultsof the determination of the complex dielectric function of a number of semiconductors, namely, GaSb, GaAs, InGaAs, CdTe and CdHgTe. 2005 artículo científico 0035-001X https://www.redalyc.org/articulo.oa?id=57063909 https://www.redalyc.org/journal/570/57063909/ https://www.redalyc.org/journal/570/57063909/html/ https://www.redalyc.org/journal/570/57063909/57063909.epub https://www.redalyc.org/journal/570/57063909/movil en http://www.redalyc.org/revista.oa?id=570 Revista Mexicana de Física application/pdf Sociedad Mexicana de Física A.C. Revista Mexicana de Física (México) Num.3 Vol.51
title Lock-in amplifier-based rotating-analyzer spectroscopic ellipsometer with micro-controlled angular frequency
topic Física, Astronomía y Matemáticas
Ellipsometers
control systems
dielectric function
optical properties of thin films
url https://www.redalyc.org/articulo.oa?id=57063909
https://www.redalyc.org/journal/570/57063909/
https://www.redalyc.org/journal/570/57063909/html/
https://www.redalyc.org/journal/570/57063909/57063909.epub
https://www.redalyc.org/journal/570/57063909/movil