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  • XANES and EXAFS study of the TiN Thin films grown by the pulsed DC sputtering technique assisted by balanced magnetron
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XANES and EXAFS study of the TiN Thin films grown by the pulsed DC sputtering technique assisted by balanced magnetron

Fuente: Redalyc
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Bibliographic Details
Main Author: I. Yocupicio
Format: Artículo científico
Language:en
Published: Sociedad Mexicana de Física A.C. 2007
Subjects:
Física, Astronomía y Matemáticas
TiN
PLD
thin films
Nitruration
Online Access:
Acceder al recurso 1 Acceder al recurso 2 Acceder al recurso 3 Acceder al recurso 4 Acceder al recurso 5
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Internet

https://www.redalyc.org/articulo.oa?id=57066318
https://www.redalyc.org/journal/570/57066318/
https://www.redalyc.org/journal/570/57066318/html/
https://www.redalyc.org/journal/570/57066318/57066318.epub
https://www.redalyc.org/journal/570/57066318/movil

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