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Physical properties of reactive RF sputtered a-IZON thin films

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Bibliographic Details
Main Author:	P. Castillo-Castillo
Format:	Artículo científico
Language:	en
Published:	Sociedad Mexicana de Física A.C. 2019
Subjects:	Física, Astronomía y Matemáticas IZON amorphous oxynitride spectral ellipsometry Indium zinc oxynitride amorphous semiconductor
Online Access:	Acceder al recurso
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