Design and analysis of a MEMS variable capacitor using thermal actuators
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| Format: | Artículo científico |
| Sprache: | en |
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Instituto Politécnico Nacional
2006
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| _version_ | 1876442035751223296 |
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| author | José Mireles |
| author_facet | José Mireles |
| contents | Design and analysis of a MEMS variable capacitor using thermal actuators José Mireles Humberto Ochoa Víctor Hinostroza Computación MEMS FEA MEMS Design Thermal Actuators Variable Capacitors We present the design and analysis of a MEMS variable capacitor coupled to thermal actuators. The variable capacitoris composed by two main components: 1) the capacitor built by two squared plates, which one plate is mechanicallyfixed to the substrate and the other is a moving plate having mechanical suspensions (springs) connected from eachcorner of it to the substrate, and 2) a set of thermal actuators that push the moving plate away from the substrate.Depending on the power applied on the thermal actuators, these would push up the variable plate from its sides, whilethe suspension pulls the plate down to the substrate for equilibrium. This work includes the design fabrication stepsusing PolyMUMPS process, and provides tables for the resulting values of the variable capacitors. The resultsaccomplished using COVENTORWARE software show that the variable capacitor has potential for automaticcompensation of capacitances and for integration into frequency oscillators and filters. 2006 artículo científico 1405-5546 https://www.redalyc.org/articulo.oa?id=61501102 en http://www.redalyc.org/revista.oa?id=615 Computación y Sistemas application/pdf Instituto Politécnico Nacional Computación y Sistemas (México) Num.1 Vol.10 |
| format | Artículo científico |
| id | redalyc_61501102 |
| institution | Redalyc |
| language | en |
| publishDate | 2006 |
| publisher | Instituto Politécnico Nacional |
| spellingShingle | Design and analysis of a MEMS variable capacitor using thermal actuators José Mireles Computación MEMS FEA MEMS Design Thermal Actuators Variable Capacitors Design and analysis of a MEMS variable capacitor using thermal actuators José Mireles Humberto Ochoa Víctor Hinostroza Computación MEMS FEA MEMS Design Thermal Actuators Variable Capacitors We present the design and analysis of a MEMS variable capacitor coupled to thermal actuators. The variable capacitoris composed by two main components: 1) the capacitor built by two squared plates, which one plate is mechanicallyfixed to the substrate and the other is a moving plate having mechanical suspensions (springs) connected from eachcorner of it to the substrate, and 2) a set of thermal actuators that push the moving plate away from the substrate.Depending on the power applied on the thermal actuators, these would push up the variable plate from its sides, whilethe suspension pulls the plate down to the substrate for equilibrium. This work includes the design fabrication stepsusing PolyMUMPS process, and provides tables for the resulting values of the variable capacitors. The resultsaccomplished using COVENTORWARE software show that the variable capacitor has potential for automaticcompensation of capacitances and for integration into frequency oscillators and filters. 2006 artículo científico 1405-5546 https://www.redalyc.org/articulo.oa?id=61501102 en http://www.redalyc.org/revista.oa?id=615 Computación y Sistemas application/pdf Instituto Politécnico Nacional Computación y Sistemas (México) Num.1 Vol.10 |
| title | Design and analysis of a MEMS variable capacitor using thermal actuators |
| topic | Computación MEMS FEA MEMS Design Thermal Actuators Variable Capacitors |
| url | https://www.redalyc.org/articulo.oa?id=61501102 |