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Design and analysis of a MEMS variable capacitor using thermal actuators

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Bibliographic Details
Main Author:	José Mireles
Format:	Artículo científico
Language:	en
Published:	Instituto Politécnico Nacional 2006
Subjects:	Computación MEMS FEA MEMS Design Thermal Actuators Variable Capacitors
Online Access:	Acceder al recurso
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