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Bibliographic Details
Main Author: Jhon Jairo Olaya
Format: Artículo científico
Language:es
Published: Universidad Nacional de Colombia 2010
Subjects:
Ingeniería
UBM
Nitruros metálicos
sputtering reactivo
magnetrón desbalanceado
Online Access:https://www.redalyc.org/articulo.oa?id=64312498022
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Internet

https://www.redalyc.org/articulo.oa?id=64312498022

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