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The corrosion resistance and microstructure of UBM system-deposited NbxSiyNz thin films

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Bibliographic Details
Main Author:	L. Velasco
Format:	Artículo científico
Language:	en
Published:	Universidad Nacional de Colombia 2012
Subjects:	Ingeniería x ray polar isation Corrosion thin film
Online Access:	Acceder al recurso
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