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AlN film deposition as a semiconductor device

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Dettagli Bibliografici
Autore principale:	Julio Cesar Caicedo
Natura:	Artículo científico
Lingua:	en
Pubblicazione:	Universidad Nacional de Colombia 2013
Soggetti:	Ingeniería aluminium nitride acoustic wave speed Pulsed laser deposition
Accesso online:	Acceder al recurso
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