PARAMETERIZED LAYOUT SYNTHESIS OF A CMOS-COMPATIBLE SCANNING MICROMIRROR WITH ELECTROTHERMAL ACTUATION AND BIMODAL RESONANT BEHAVIOR
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| Formato: | Artículo científico |
| Lenguaje: | en |
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Universidad de Guadalajara
2011
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| _version_ | 1876460368032694272 |
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| author | Sergio Camacho León |
| author_facet | Sergio Camacho León |
| contents | PARAMETERIZED LAYOUT SYNTHESIS OF A CMOS-COMPATIBLE SCANNING MICROMIRROR WITH ELECTROTHERMAL ACTUATION AND BIMODAL RESONANT BEHAVIOR Sergio Camacho León Sergio O. Martínez Alex Elías Zuñiga Graciano Dieck Assad Multidisciplinarias (Ciencias Sociales) CMOS Microsystems optical imaging design methodology multiphysics modeling This paper reports a layout synthesis methodology for design automation of a CMOS-compatible scanning micromirror with bimodal resonant behavior. The micromirror is suspended by cantilever, out-of-plane thermal bimorph actuators. Thickness optimization and scanning at second resonance is proposed to overcome the trade-off between the static and dynamic performance of the device. The objective is to automatically obtain the device layout that concurrently maximize the rotation angle, minimize the power consumption and satisfies both fabrication constraints of a standard CMOS process and high- level specifications for position of rotation axis at second resonance, scan frequency and maximum actuation voltage. The methodology uses an intermediate-level design space, defined by the thermal-to-electrical resistance ratio at room temperature of the device, to couple the constraints for maximum thermal stress and maximum current density of CMOS materials. The function evaluation procedure is developed based on a lumped element model of thermal resistance to systematically explore the design space using parametric variations of layout parameters. The methodology is applied to design a microscanner which has applications in optical coherence imaging systems. The performance of the synthesized microscanner is verified by finite element method simulations. Comparison between numerically obtained result and high-level specifications shows a good fit. 2011 artículo científico 1665-5745 https://www.redalyc.org/articulo.oa?id=73020063010 en http://www.redalyc.org/revista.oa?id=730 e-Gnosis application/pdf Universidad de Guadalajara e-Gnosis (México) Vol.9 |
| format | Artículo científico |
| id | redalyc_73020063010 |
| institution | Redalyc |
| language | en |
| publishDate | 2011 |
| publisher | Universidad de Guadalajara |
| spellingShingle | PARAMETERIZED LAYOUT SYNTHESIS OF A CMOS-COMPATIBLE SCANNING MICROMIRROR WITH ELECTROTHERMAL ACTUATION AND BIMODAL RESONANT BEHAVIOR Sergio Camacho León Multidisciplinarias (Ciencias Sociales) CMOS Microsystems optical imaging design methodology multiphysics modeling PARAMETERIZED LAYOUT SYNTHESIS OF A CMOS-COMPATIBLE SCANNING MICROMIRROR WITH ELECTROTHERMAL ACTUATION AND BIMODAL RESONANT BEHAVIOR Sergio Camacho León Sergio O. Martínez Alex Elías Zuñiga Graciano Dieck Assad Multidisciplinarias (Ciencias Sociales) CMOS Microsystems optical imaging design methodology multiphysics modeling This paper reports a layout synthesis methodology for design automation of a CMOS-compatible scanning micromirror with bimodal resonant behavior. The micromirror is suspended by cantilever, out-of-plane thermal bimorph actuators. Thickness optimization and scanning at second resonance is proposed to overcome the trade-off between the static and dynamic performance of the device. The objective is to automatically obtain the device layout that concurrently maximize the rotation angle, minimize the power consumption and satisfies both fabrication constraints of a standard CMOS process and high- level specifications for position of rotation axis at second resonance, scan frequency and maximum actuation voltage. The methodology uses an intermediate-level design space, defined by the thermal-to-electrical resistance ratio at room temperature of the device, to couple the constraints for maximum thermal stress and maximum current density of CMOS materials. The function evaluation procedure is developed based on a lumped element model of thermal resistance to systematically explore the design space using parametric variations of layout parameters. The methodology is applied to design a microscanner which has applications in optical coherence imaging systems. The performance of the synthesized microscanner is verified by finite element method simulations. Comparison between numerically obtained result and high-level specifications shows a good fit. 2011 artículo científico 1665-5745 https://www.redalyc.org/articulo.oa?id=73020063010 en http://www.redalyc.org/revista.oa?id=730 e-Gnosis application/pdf Universidad de Guadalajara e-Gnosis (México) Vol.9 |
| title | PARAMETERIZED LAYOUT SYNTHESIS OF A CMOS-COMPATIBLE SCANNING MICROMIRROR WITH ELECTROTHERMAL ACTUATION AND BIMODAL RESONANT BEHAVIOR |
| topic | Multidisciplinarias (Ciencias Sociales) CMOS Microsystems optical imaging design methodology multiphysics modeling |
| url | https://www.redalyc.org/articulo.oa?id=73020063010 |