Interfacial reactions of Ti/ and Zr/Si1-xGex/Si contacts with rapid thermal annealing

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Bibliographic Details
Main Author:	Yukio Yasuda
Format:	Artículo científico
Language:	en
Published:	Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C. 1999
Subjects:	Física, Astronomía y Matemáticas Ti Zr SiGe system Electrical property Interfacial reaction
Online Access:	Acceder al recurso
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