Growth mode variations of thin films on nano-faceted substrates

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Autor principal: K. Mae
Formato: Artículo científico
Lenguaje:en
Publicado: Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C. 1999
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author K. Mae
author_facet K. Mae
contents Growth mode variations of thin films on nano-faceted substrates K. Mae T. Honda Física, Astronomía y Matemáticas growth mode faceted substrate molecular dynamics kinetic Monte Carlo We have investigated the growth mode of thin films on substrates with a faceted surface structure of a nanometer scaleby means of computer simulations. The simulations have been performed for various combinations of the growthparameters such as the substrate temperature, the lattice mismatch between the film and the substrate, the interactionbetween the film and substrate atoms. In order to perform realistic growth simulations we have developed themoleculardynamics (MD) aided kinetic Monte Carlo (KMC) method. In the method MD deals with non-equilibrium structuralrelaxation of surface clusters and KMC deals with thermally activated adatom migrations. The film growth is classifiedinto three types. The growth is promoted in the valley region or in the ridge region, or it has no site preference,depending on the growth parameters. The relation between the film growth on faceted substrates and that on flatsubstrates is discussed 1999 artículo científico 1665-3521 https://www.redalyc.org/articulo.oa?id=94200909 en http://www.redalyc.org/revista.oa?id=942 Superficies y vacío application/pdf Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C. Superficies y vacío (México) Num.9
format Artículo científico
id redalyc_94200909
institution Redalyc
language en
publishDate 1999
publisher Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C.
spellingShingle Growth mode variations of thin films on nano-faceted substrates
K. Mae
Física, Astronomía y Matemáticas
growth mode
faceted substrate
molecular dynamics
kinetic Monte Carlo
Growth mode variations of thin films on nano-faceted substrates K. Mae T. Honda Física, Astronomía y Matemáticas growth mode faceted substrate molecular dynamics kinetic Monte Carlo We have investigated the growth mode of thin films on substrates with a faceted surface structure of a nanometer scaleby means of computer simulations. The simulations have been performed for various combinations of the growthparameters such as the substrate temperature, the lattice mismatch between the film and the substrate, the interactionbetween the film and substrate atoms. In order to perform realistic growth simulations we have developed themoleculardynamics (MD) aided kinetic Monte Carlo (KMC) method. In the method MD deals with non-equilibrium structuralrelaxation of surface clusters and KMC deals with thermally activated adatom migrations. The film growth is classifiedinto three types. The growth is promoted in the valley region or in the ridge region, or it has no site preference,depending on the growth parameters. The relation between the film growth on faceted substrates and that on flatsubstrates is discussed 1999 artículo científico 1665-3521 https://www.redalyc.org/articulo.oa?id=94200909 en http://www.redalyc.org/revista.oa?id=942 Superficies y vacío application/pdf Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C. Superficies y vacío (México) Num.9
title Growth mode variations of thin films on nano-faceted substrates
topic Física, Astronomía y Matemáticas
growth mode
faceted substrate
molecular dynamics
kinetic Monte Carlo
url https://www.redalyc.org/articulo.oa?id=94200909