Cover Image

Preparation of reactive magnetron sputtered SiC films by RF-RMS technique

Fuente: Redalyc

Saved in:

Bibliographic Details
Main Author:	E. Andrade
Format:	Artículo científico
Language:	en
Published:	Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C. 1999
Subjects:	Física, Astronomía y Matemáticas
Online Access:	Acceder al recurso
Tags:	Add Tag No Tags, Be the first to tag this record!

Similar Items

Optical and structural characterization of TiOx Ny films deposited by reactive magnetron sputtering
by: E. Hernández-Rodríguez
Published: (2009)

Post-deposit annealing of ITO films produced by r.f. magnetron sputtering
by: M. Cruz-Jáuregui
Published: (1997)

Characterization of ALN thin films deposited by DC reactive magnetron sputtering
by: M. García-Méndez
Published: (2008)

Characterization of diamond-like carbon (DLC) thin films prepared by r.f. magnetron sputtering
by: C. Rincón
Published: (1999)

Characterization of nanostructured SnO2 films deposited by reactive DC-magnetron sputtering
by: M. A. Camacho-López
Published: (2013)

Caracterización de capas de GaAs y GaAsMn depositadas por magnetrón sputtering
by: C.A. Pulzara-Mora
Published: (2016)

XANES and EXAFS study of the TiN Thin films grown by the pulsed DC sputtering technique assisted by balanced magnetron
by: I. Yocupicio
Published: (2007)

Numerical Simulation of the Optical Properties of SiC/SiO2 Quantum Dots
by: J. S. de Sousa
Published: (2004)

Physical properties of reactive RF sputtered a-IZON thin films
by: P. Castillo-Castillo
Published: (2019)

Optical and structural characterization ot the heterostructure CdTe/GaAs grown by RF sputtering
by: M. Meléndez-Lira
Published: (1999)

Polycristalline growth of zinc blende gallium arsenide layers by R.F. magnetron sputtering
by: R. Bernal Correa
Published: (2014)

Effects of the methane content on the characteristics of diamond like carbon films produced by sputtering
by: R.D. Mansano
Published: (1999)

Characterization of sputtered Ta-Ru thin films for ink-jet heater applications
by: C. C. Chan
Published: (1999)

Synthesis of self-assembled Ge nanocrystals employing reactive RF sputtering
by: A. Hernández-Hernández
Published: (2016)

Confinement effects on CdTe:O sputtered films prepared at high substrate temperature
by: Humberto Arizpe-Chávez
Published: (1999)

Transparent conducting zinc-co-doped ITO films prepared by magnetron sputtering
by: Tadatsugu Minami
Published: (1999)

High - temperature dependence of low magnetization Mn 5 Ge 3 phase formation of sputtered thin films
by: A. Alvídrez - Lechuga
Published: (2017)

Aluminum-doped ZnO polycrystalline films prepared by co-sputtering of a ZnO-Al target
by: M. Becerril
Published: (2014)

Preparation and optical properties of Ge and C-induced Ge quantum dots on Si
by: K. Eberl
Published: (1999)

Cu4O3 thin films deposited by non-reactive rf-magnetron sputtering from a copper oxide target
by: M. A Cruz Almazan
Published: (2021)

Ion beam sputter deposition of low work function and GMR materials
by: G. E. McGuire
Published: (1999)

Influence of high frequency and moderate energy pulses on DLC deposition onto metallic substrates by magnetron sputtering technique
by: R. M. Oliveira
Published: (2009)

Influence of process parameters on the growth of pure-phase anatase and rutile TiO2 thin films deposited by low temperature reactive magnetron sputtering
by: H. Toku
Published: (2010)

Effects of temperature and deposition time on the RF- sputtered CdTe films preparation
by: E. Camacho-Espinosa
Published: (2014)

Mechanical and tribological properties of tungsten carbide sputtered coatings
by: J. Esteve
Published: (1999)

Structural, optical and morphological properties of InxGa1-xAs layers o btained by RF magnetron sputtering
by: A. Pulzara-Mora
Published: (2016)

Estudio de películas de GaN crecidas por epitaxia de haces moleculares sobre substratos de Si en las direcciones (111) y (001) recubiertos con una capa delgada de SiC
by: M. Cervantes Contreras
Published: (2000)

Preparation and properties of precursor Ba-Ca-Cu-(O,F) thin films deposited from fluorides for superconducting Tl- and Hg- based films
by: ¿ Beòaèka
Published: (1999)

ZnSe epitaxial films grown by MBE on nitrogen treated Si(111) substrates
by: V. H. Méndez-García
Published: (1999)

Semiconductor thin films grown by RF-co-sputtering of CdTe and Al targets
by: M. Becerril-Silva
Published: (2005)

SnO2:F thin films deposited by RF magnetron sputtering: effect of the SnF2 amount in the target on the physical properties
by: F. de Moure-Flores
Published: (2013)

Formation of SiOx nano-films at laser ablation of Si and composite SiC-ceramic
by: P.A. Marquez Aguilar
Published: (2007)

Influence of the Al content on the optical properties of ZnO thin films obtained by the sol-gel technique
by: D. C. Altamirano Juárez
Published: (2001)

Interface description using computational methods and tribological characteristic OF TiN/TiC films prepared by reactive pulse arc evaporation technique
by: D.M. Devia Narvaez
Published: (2013)

Application of the total internal reflection phenomenon as a gas sensing technique using evaporated SnO2 thin films
by: L. Martínez
Published: (2004)

Epitaxial CdSe thin films grown by a modified closed space isothermal vapor phase technique using two elemental sources
by: H. Rodríguez
Published: (1997)

Growth and characterization of Ge1-xSnx alloys grown by magnetron sputter deposition
by: H. Pérez Ladrón de Guevara
Published: (2003)

Adsorption of C2H2C2O3 on Si(001)
by: R. Miotto
Published: (2004)

Compositional mixture in R.F. sputtered CdTe oxide films. Raman spectroscopy results
by: A. Martel
Published: (2003)

Influence of ferroelectric layer on artificial multiferroic LSMO/BTO bilayers deposited by DC and RF sputtering
by: J.E. Ordoñez
Published: (2016)