APA (7th ed.) Citation

Ferrieu, F. (1999). Spectroscopic ellipsometry of SixGe1 x / Si: A tool for composition and profile analysis in strained heterostructure used in the microelectronics industry. Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C.

Chicago Style (17th ed.) Citation

Ferrieu, F. Spectroscopic Ellipsometry of SixGe1 X / Si: A Tool for Composition and Profile Analysis in Strained Heterostructure Used in the Microelectronics Industry. Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C, 1999.

MLA (9th ed.) Citation

Ferrieu, F. Spectroscopic Ellipsometry of SixGe1 X / Si: A Tool for Composition and Profile Analysis in Strained Heterostructure Used in the Microelectronics Industry. Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C, 1999.