Spectroscopic ellipsometry of SixGe1 x / Si : a tool for composition and profile analysis in strained heterostructure used in the microelectronics industry

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Bibliographic Details
Main Author:	F. Ferrieu
Format:	Artículo científico
Language:	en
Published:	Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C. 1999
Subjects:	Física, Astronomía y Matemáticas SixGe1 alloys optical properties strained SiGe alloys spectroscopic ellipsometry
Online Access:	Acceder al recurso
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